Inventor · Yorktown Heights, NY, US

Mark A. Jaso

26Patents
17h-index
46Co-inventors
77Inventor score

Filing activity: Apr 4, 1991 → Aug 29, 2008

Most-cited inventions

PatentTitleAreaCited byStatus
US5246884A CVD diamond or diamond-like carbon for chemical-mechanical polish etch stop Electricity 128 Expired
US6093631A Dummy patterns for aluminum chemical polishing (CMP) Emerging Cross-Sectional Technologies 66 Expired
US5894152A SOI/bulk hybrid substrate and method of forming the same Electricity 65 Expired
US5055158A Planarization of Josephson integrated circuit Emerging Cross-Sectional Technologies 64 Expired
US6025226A Method of forming a capacitor and a capacitor formed using the method Electricity 63 Expired
US6045434A Method and apparatus of monitoring polishing pad wear during processing Performing Operations; Transporting 48 Expired
US6632377B1 Chemical-mechanical planarization of metallurgy Electricity 47 Expired
US5573633A Method of chemically mechanically polishing an electronic component Electricity 45 Expired
US6107125A SOI/bulk hybrid substrate and method of forming the same Electricity 34 Expired
US5854140A Method of making an aluminum contact Electricity 34 Expired
US5656535A Storage node process for deep trench-based DRAM Emerging Cross-Sectional Technologies 31 Expired
US6186864A Method and apparatus for monitoring polishing pad wear during processing Performing Operations; Transporting 31 Expired
US6166423A Integrated circuit having a via and a capacitor Electricity 31 Expired
US6344409B1 Dummy patterns for aluminum chemical polishing (CMP) Emerging Cross-Sectional Technologies 25 Expired
US5264387A Method of forming uniformly thin, isolated silicon mesas on an insulating substrate Emerging Cross-Sectional Technologies 20 Expired
US5726099A Method of chemically mechanically polishing an electronic component using a non-selective ammonium persulfate slurry Electricity 17 Expired
US6153474A Method of controllably forming a LOCOS oxide layer over a portion of a vertically extending sidewall of a trench extending into a semiconductor substrate Emerging Cross-Sectional Technologies 17 Expired
US6811657B2 Device for measuring the profile of a metal film sputter deposition target, and system and method employing same Chemistry; Metallurgy 13 Expired
US6136686A Fabrication of interconnects with two different thicknesses Electricity 13 Expired
US5795826A Method of chemically mechanically polishing an electronic component Electricity 9 Expired
US6114248A Process to reduce localized polish stop erosion Electricity 3 Expired
US5885899A Method of chemically mechanically polishing an electronic component using a non-selective ammonium hydroxide slurry Electricity 3 Expired
US7974505B2 Method for fabricating selectively coupled optical waveguides on a substrate Physics 3 Active
US6974524B1 Apparatus, method and system for monitoring chamber parameters associated with a deposition process Chemistry; Metallurgy 2 Expired
US8192638B2 Method for manufacturing multiple layers of waveguides Physics 2 Active

Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.