Michael E. Thomas
64Patents
27h-index
36Co-inventors
88Inventor score
Filing activity: Jun 6, 1983 → Dec 29, 2016
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US4933743A | High performance interconnect system for an integrated circuit | Electricity | 173 | Expired |
| US6509283B1 | Thermal oxidation method utilizing atomic oxygen to reduce dangling bonds in silicon dioxide grown on silicon | Electricity | 151 | Expired |
| US4920071A | High temperature interconnect system for an integrated circuit | Emerging Cross-Sectional Technologies | 147 | Expired |
| US5117276A | High performance interconnect system for an integrated circuit | Electricity | 132 | Expired |
| US5688724A | Method of providing a dielectric structure for semiconductor devices | Emerging Cross-Sectional Technologies | 114 | Expired |
| US5197999A | Polishing pad for planarization | Chemistry; Metallurgy | 103 | Expired |
| US5133284A | Gas-based backside protection during substrate processing | Electricity | 86 | Expired |
| US5000818A | Method of fabricating a high performance interconnect system for an integrated circuit | Electricity | 76 | Expired |
| US5111355A | High value tantalum oxide capacitor | Emerging Cross-Sectional Technologies | 75 | Expired |
| US4670091A | Process for forming vias on integrated circuits | Electricity | 68 | Expired |
| US5150019A | Integrated circuit electronic grid device and method | Electricity | 52 | Expired |
| US5279988A | Process for making microcomponents integrated circuits | Electricity | 51 | Expired |
| US4835466A | Apparatus and method for detecting spot defects in integrated circuits | Physics | 45 | Expired |
| US5904507A | Programmable anti-fuses using laser writing | Electricity | 43 | Expired |
| US5609925A | Curing hydrogen silsesquioxane resin with an electron beam | Electricity | 42 | Expired |
| US4640004A | Method and structure for inhibiting dopant out-diffusion | Emerging Cross-Sectional Technologies | 40 | Expired |
| US5051690A | Apparatus and method for detecting vertically propagated defects in integrated circuits | Physics | 39 | Expired |
| US5539936A | Sports helmet transparent guard assembly | Human Necessities | 37 | Expired |
| US5679405A | Method for preventing substrate backside deposition during a chemical vapor deposition operation | Electricity | 35 | Expired |
| US4829363A | Structure for inhibiting dopant out-diffusion | Emerging Cross-Sectional Technologies | 34 | Expired |
| US5592643A | Ferroelectric storage device emulating a rotating disk drive unit in acomputer system and having a parallel data interface | Physics | 31 | Expired |
| US5414301A | High temperature interconnect system for an integrated circuit | Emerging Cross-Sectional Technologies | 31 | Expired |
| US5249732A | Method of bonding semiconductor chips to a substrate | Electricity | 31 | Expired |
| US6004878A | Method for silicide stringer removal in the fabrication of semiconductor integrated circuits | Electricity | 30 | Expired |
| US5195729A | Wafer carrier | Electricity | 29 | Expired |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.