Inventor · Palo Alto, CA, US

Michael X. Yang

61Patents
5h-index
50Co-inventors
75Inventor score

Filing activity: Aug 24, 1989 → Mar 6, 2024

Most-cited inventions

PatentTitleAreaCited byStatus
US8734442B2 Ablation catheter with thermally mediated catheter body for mitigating blood coagulation and creating larger lesion Human Necessities 90 Active
US8449537B2 Ablation catheter with thermally mediated catheter body for mitigating blood coagulation and creating larger lesion Human Necessities 56 Active
US7168694B2 Multi-axis workpiece chuck Physics 12 Expired
US10269574B1 Surface treatment of carbon containing films using organic radicals Electricity 10 Active
US11087409B1 Systems and methods for generating accurate transaction data and manipulation Physics 10 Active
US11062910B2 Surface treatment of silicon or silicon germanium surfaces using organic radicals Electricity 4 Active
US10403492B1 Integration of materials removal and surface treatment in semiconductor device fabrication Electricity 4 Active
US11043393B2 Ozone treatment for selective silicon nitride etch over silicon Electricity 4 Active
US5028915A Device for controlling a display with a plurality of strings of light-emitting elements Physics 3 Expired
US10804109B2 Surface treatment of silicon and carbon containing films by remote plasma with organic precursors Electricity 3 Active
US10580672B2 Systems and methods for workpiece processing Electricity 3 Active
US10354883B2 Surface treatment of silicon or silicon germanium surfaces using organic radicals Electricity 3 Active
US10299820B2 Methods and systems for disrupting calcified walls of biological conduits and calcified lesions therein Human Necessities 2 Active
US11610824B2 Transmission-based temperature measurement of a workpiece in a thermal processing system Physics 2 Active
US9190294B2 Methods and apparatus for separating a substrate Emerging Cross-Sectional Technologies 2 Active
US7530557B2 Multi-axis workpiece chuck Physics 2 Active
US11276560B2 Spacer etching process Electricity 1 Active
US10573532B2 Method for processing a workpiece using a multi-cycle thermal treatment process Electricity 1 Active
US11387111B2 Processing of workpieces with reactive species generated using alkyl halide Electricity 1 Active
US11289323B2 Processing of semiconductors using vaporized solvents Electricity 1 Active
US10964528B2 Integration of materials removal and surface treatment in semiconductor device fabrication Electricity 1 Active
US11482434B2 Systems and methods for workpiece processing Electricity 1 Active
US11955388B2 Transmission-based temperature measurement of a workpiece in a thermal processing system Physics 1 Active
US11495437B2 Surface pretreatment process to improve quality of oxide films produced by remote plasma Electricity 1 Active
US11164725B2 Generation of hydrogen reactive species for processing of workpieces Electricity 1 Active

Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.