Munehiro Tada
57Patents
7h-index
33Co-inventors
68Inventor score
Filing activity: Feb 22, 2002 → Jan 7, 2020
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US9406877B2 | Semiconductor device and method of manufacturing the same | Electricity | 20 | Active |
| US7701060B2 | Wiring structure and method for manufacturing the same | Electricity | 12 | Expired |
| US8766233B2 | Semiconductor device with variable resistance element and method for manufacturing the same | Electricity | 10 | Active |
| US8198730B2 | Semiconductor device and method of manufacturing the same | Electricity | 9 | Active |
| US8536629B2 | Semiconductor device and method for manufacturing the same | Electricity | 9 | Active |
| US8004087B2 | Semiconductor device with dual damascene wirings and method for manufacturing same | Electricity | 7 | Active |
| US8586958B2 | Switching element and manufacturing method thereof | Physics | 7 | Active |
| US9245789B2 | Method for forming wiring | Electricity | 7 | Active |
| US9029825B2 | Semiconductor device and manufacturing method for semiconductor device | Electricity | 7 | Active |
| US6972453B2 | Method of manufacturing a semiconductor device capable of etching a multi-layer of organic films at a high selectivity | Electricity | 6 | Expired |
| US8816312B2 | Semiconductor device | Physics | 6 | Active |
| US7622808B2 | Semiconductor device and having trench interconnection | Electricity | 5 | Expired |
| US8278763B2 | Semiconductor device | Electricity | 5 | Active |
| US8043957B2 | Semiconductor device, method for manufacturing semiconductor device and apparatus for manufacturing semiconductor | Electricity | 4 | Active |
| US10340451B2 | Switching element having overlapped wiring connections and method for fabricating semiconductor switching device | Electricity | 2 | Active |
| US8174122B2 | Semiconductor device | Electricity | 2 | Active |
| US8872542B2 | Semiconductor device and semiconductor device control method | Physics | 2 | Active |
| US8790785B2 | Method of forming a porous insulation film | Emerging Cross-Sectional Technologies | 2 | Active |
| US8188600B2 | Semiconductor device and method of fabricating the same | Electricity | 2 | Active |
| US9059028B2 | Semiconductor device and method for manufacturing same | Electricity | 2 | Active |
| US8592303B2 | Wiring structure and method for manufacturing the same | Electricity | 2 | Active |
| US8946672B2 | Resistance changing element capable of operating at low voltage, semiconductor device, and method for forming resistance change element | Electricity | 1 | Active |
| US8796659B2 | Variable resistance element, semiconductor device including variable resistance element, and methods for manufacturing variable resistance element and semiconductor device | Electricity | 1 | Active |
| US9508432B2 | Semiconductor device with variable resistance switch and programming method therefor | Electricity | 1 | Active |
| US7482694B2 | Semiconductor device and its manufacturing method | Electricity | 1 | Expired |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.