Inventor · Ichikawa, JP

Naomu Kitano

22Patents
4h-index
28Co-inventors
59Inventor score

Filing activity: Feb 6, 2006 → Mar 5, 2018

Most-cited inventions

PatentTitleAreaCited byStatus
US8088678B2 Semiconductor manufacturing apparatus and method Electricity 13 Active
US7867847B2 Method of manufacturing dielectric film that has hafnium-containing and aluminum-containing oxynitride Electricity 5 Active
US8030694B2 Dielectric film and semiconductor device using dielectric film including hafnium, aluminum or silicon, nitrogen, and oxygen Electricity 4 Active
US7857946B2 Sputtering film forming method, electronic device manufacturing method, and sputtering system Chemistry; Metallurgy 4 Active
US7923360B2 Method of forming dielectric films Electricity 3 Active
US8178934B2 Dielectric film with hafnium aluminum oxynitride film Electricity 3 Active
US8415753B2 Semiconductor device and method of manufacturing the same Electricity 3 Active
US8053311B2 Dielectric film and semiconductor device using dielectric film including hafnium, aluminum or silicon, nitrogen, and oxygen Electricity 3 Active
US8288234B2 Method of manufacturing hafnium-containing and silicon-containing metal oxynitride dielectric film Electricity 3 Active
US8481382B2 Method and apparatus for manufacturing semiconductor device Electricity 2 Active
US8148275B2 Method for forming dielectric films Electricity 2 Active
US8835296B2 Electronic component manufacturing method including step of embedding metal film Electricity 2 Active
US8324608B2 Nonvolatile storage element and manufacturing method thereof Electricity 2 Active
US7655549B2 Method for depositing a metal gate on a high-k dielectric film Electricity 2 Active
US8232189B2 Dielectric film manufacturing method Electricity 2 Active
US8026143B2 Semiconductor element and manufacturing method thereof Electricity 1 Active
US8012822B2 Process for forming dielectric films Electricity 1 Active
US8524617B2 Methods for manufacturing dielectric films Electricity 0 Active
US9437702B2 Electronic component manufacturing method and electrode structure Electricity 0 Active
US8669624B2 Semiconductor device and manufacturing method thereof Electricity 0 Active
US10297797B2 Method for manufacturing display device Electricity 0 Active
US8786031B2 Metal nitride film, semiconductor device using the metal nitride film, and manufacturing method of semiconductor device Electricity 0 Active

Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.