Inventor · Portland, OR, US

Patrick Breiling

22Patents
6h-index
49Co-inventors
69Inventor score

Filing activity: Mar 17, 2003 → May 31, 2024

Most-cited inventions

PatentTitleAreaCited byStatus
US9399228B2 Method and apparatus for purging and plasma suppression in a process chamber Emerging Cross-Sectional Technologies 411 Active
US7854828B2 Method and apparatus for electroplating including remotely positioned second cathode Chemistry; Metallurgy 48 Active
US8741394B2 In-situ deposition of film stacks Electricity 15 Active
US9758868B1 Plasma suppression behind a showerhead through the use of increased pressure Chemistry; Metallurgy 14 Active
US9028924B2 In-situ deposition of film stacks Electricity 6 Active
US10604841B2 Integrated showerhead with thermal control for delivering radical and precursor gas to a downstream chamber to enable remote plasma film deposition Electricity 6 Active
US10214816B2 PECVD apparatus for in-situ deposition of film stacks Electricity 4 Active
US10655224B2 Conical wafer centering and holding device for semiconductor processing Electricity 4 Active
US11608559B2 Integrated showerhead with thermal control for delivering radical and precursor gas to a downstream chamber to enable remote plasma film deposition Electricity 4 Active
US11101164B2 Integrated showerhead with thermal control for delivering radical and precursor gas to a downstream chamber to enable remote plasma film deposition Electricity 3 Active
US10622243B2 Planar substrate edge contact with open volume equalization pathways and side containment Electricity 2 Active
US7413616B2 Active rinse shield for electrofill chemical bath and method of use Emerging Cross-Sectional Technologies 1 Active
US12000047B2 Integrated showerhead with thermal control for delivering radical and precursor gas to a downstream chamber to enable remote plasma film deposition Electricity 1 Active
US10984987B2 Showerhead faceplate having flow apertures configured for hollow cathode discharge suppression Electricity 1 Active
US7146994B2 Active rinse shield for electrofill chemical bath and method of use Emerging Cross-Sectional Technologies 1 Expired
US12385138B2 Plasma-enhanced deposition of film stacks Electricity 0 Active
US11232966B2 Electrostatic chucking pedestal with substrate backside purging and thermal sinking Electricity 0 Active
US11443975B2 Planar substrate edge contact with open volume equalization pathways and side containment Electricity 0 Active
US11837443B2 Showerhead faceplate having flow apertures configured for hollow cathode discharge suppression Electricity 0 Active
US11515124B2 Showerhead faceplate having flow apertures configured for hollow cathode discharge suppression Electricity 0 Active
US12331402B2 Integrated showerhead with thermal control for delivering radical and precursor gas to a downstream chamber to enable remote plasma film deposition Electricity 0 Active
US12142509B2 Electrostatic chuck with seal surface Electricity 0 Active

Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.