Inventor · Singapore, SG

Sanjay Bhat

35Patents
4h-index
46Co-inventors
59Inventor score

Filing activity: Feb 14, 2006 → May 18, 2022

Most-cited inventions

PatentTitleAreaCited byStatus
US9497832B2 Systems and methods for managing environmental conditions Emerging Cross-Sectional Technologies 44 Active
US7794544B2 Control of gas flow and delivery to suppress the formation of particles in an MOCVD/ALD system Emerging Cross-Sectional Technologies 36 Active
US7536373B2 Resource allocation using relational fuzzy modeling Physics 8 Active
US11422096B2 Surface topography measurement apparatus and method Physics 4 Active
US10685821B2 Physical vapor deposition processing systems target cooling Performing Operations; Transporting 3 Active
US11387085B2 Multicathode deposition system Electricity 1 Active
US10826717B2 System and methods for cloud-based monitoring and control of physical environments Physics 1 Active
US10504705B2 Physical vapor deposition chamber with static magnet assembly and methods of sputtering Electricity 1 Active
US10763091B2 Physical vapor deposition chamber particle reduction apparatus and methods Electricity 1 Active
US11557473B2 System and method to control PVD deposition uniformity Electricity 1 Active
US11515132B2 Physical vapor deposition processing systems target cooling Performing Operations; Transporting 0 Active
US10602589B2 Systems and methods for managing environmental conditions Emerging Cross-Sectional Technologies 0 Active
US11390940B2 System and method to control PVD deposition uniformity Electricity 0 Active
US11480866B2 Method and apparatus to anneal EUV mask blank Physics 0 Active
US11221599B2 Systems and methods for managing environmental conditions Emerging Cross-Sectional Technologies 0 Active
US11639544B2 Physical vapor deposition system and processes Electricity 0 Active
US11365475B2 Physical vapor deposition chamber cleaning processes Electricity 0 Active
US11940724B2 Reticle processing system Physics 0 Active
US8516065B2 Criterion-dependent email display agent Electricity 0 Active
US11789358B2 Extreme ultraviolet mask blank defect reduction Physics 0 Active
US11237473B2 Physical vapor deposition system and processes Physics 0 Active
US11599016B2 Physical vapor deposition system and processes Physics 0 Active
US11542595B2 Physical vapor deposition system and processes Electricity 0 Active
US11236415B2 Deposition system with shield mount Electricity 0 Active
US11037769B2 Physical vapor deposition processing systems target cooling Performing Operations; Transporting 0 Active

Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.