Inventor · Boise, ID, US

Shane J. Trapp

21Patents
6h-index
30Co-inventors
69Inventor score

Filing activity: Aug 31, 2000 → Sep 4, 2020

Most-cited inventions

PatentTitleAreaCited byStatus
US6451705B1 Self-aligned PECVD etch mask Emerging Cross-Sectional Technologies 34 Expired
US7153779B2 Method to eliminate striations and surface roughness caused by dry etch Electricity 33 Expired
US6569774B1 Method to eliminate striations and surface roughness caused by dry etch Electricity 31 Expired
US6630410B2 Self-aligned PECVD etch mask Emerging Cross-Sectional Technologies 27 Expired
US6897120B2 Method of forming integrated circuitry and method of forming shallow trench isolation in a semiconductor substrate Electricity 22 Expired
US8624300B2 Contact integration for three-dimensional stacking semiconductor devices Electricity 12 Active
US7202171B2 Method for forming a contact opening in a semiconductor device Electricity 6 Expired
US7344975B2 Method to reduce charge buildup during high aspect ratio contact etch Emerging Cross-Sectional Technologies 4 Expired
US8889559B2 Methods of forming a pattern on a substrate Emerging Cross-Sectional Technologies 4 Active
US6806197B2 Method of forming integrated circuitry, and method of forming a contact opening Emerging Cross-Sectional Technologies 2 Expired
US9679852B2 Semiconductor constructions Electricity 2 Active
US8673787B2 Method to reduce charge buildup during high aspect ratio contact etch Emerging Cross-Sectional Technologies 2 Active
US7985692B2 Method to reduce charge buildup during high aspect ratio contact etch Emerging Cross-Sectional Technologies 1 Active
US8999852B2 Substrate mask patterns, methods of forming a structure on a substrate, methods of forming a square lattice pattern from an oblique lattice pattern, and methods of forming a pattern on a substrate Electricity 1 Active
US9984977B2 Semiconductor constructions Electricity 1 Active
US8889558B2 Methods of forming a pattern on a substrate Electricity 1 Active
US9741580B2 Substrate mask patterns, methods of forming a structure on a substrate, methods of forming a square lattice pattern from an oblique lattice pattern, and methods of forming a pattern on a substrate Electricity 0 Active
US11672118B2 Electronic devices comprising adjoining oxide materials and related systems Electricity 0 Active
US7291895B2 Integrated circuitry Emerging Cross-Sectional Technologies 0 Expired
US7419913B2 Methods of forming openings into dielectric material Electricity 0 Expired
US10930548B2 Methods of forming an apparatus for making semiconductor dieves Electricity 0 Active

Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.