Shuichi Yasuda
44Patents
10h-index
49Co-inventors
75Inventor score
Filing activity: Sep 21, 2001 → Nov 29, 2023
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US6729561B2 | Cleaning nozzle and substrate cleaning apparatus | Emerging Cross-Sectional Technologies | 82 | Expired |
| US9020363B2 | Optical transmitter | Electricity | 51 | Active |
| US7497633B2 | Substrate processing apparatus and substrate processing method | Emerging Cross-Sectional Technologies | 22 | Active |
| US9647753B1 | Coherent optical receiver | Electricity | 21 | Active |
| US7604424B2 | Substrate processing apparatus | Emerging Cross-Sectional Technologies | 19 | Active |
| US6901938B2 | Substrate cleaning apparatus | Emerging Cross-Sectional Technologies | 17 | Expired |
| US6705331B2 | Substrate cleaning apparatus | Emerging Cross-Sectional Technologies | 16 | Expired |
| US8034190B2 | Substrate processing apparatus and substrate processing method | Emerging Cross-Sectional Technologies | 15 | Active |
| US7479205B2 | Substrate processing apparatus | Performing Operations; Transporting | 11 | Expired |
| US6951221B2 | Substrate processing apparatus | Emerging Cross-Sectional Technologies | 10 | Expired |
| US10044439B2 | Optical receiver that receives polarization multiplexed optical signal | Electricity | 7 | Active |
| US7267130B2 | Substrate processing apparatus | Emerging Cross-Sectional Technologies | 6 | Expired |
| US10792712B2 | Substrate processing method and substrate processing apparatus | Electricity | 5 | Active |
| US11101147B2 | Substrate processing method and substrate processing apparatus | Electricity | 3 | Active |
| US11211241B2 | Substrate processing method and substrate processing apparatus | Electricity | 3 | Active |
| US8894775B2 | Substrate processing apparatus and substrate processing method | Electricity | 2 | Active |
| US8040488B2 | Substrate processing apparatus | Electricity | 2 | Active |
| US7600522B2 | Substrate treatment method and substrate treatment apparatus | Electricity | 2 | Active |
| US8540824B2 | Substrate processing method | Electricity | 1 | Active |
| US7428907B2 | Substrate processing apparatus | Emerging Cross-Sectional Technologies | 1 | Expired |
| US10636682B2 | Substrate processing apparatus | Electricity | 1 | Active |
| US11881417B2 | Substrate processing apparatus and substrate processing method | Emerging Cross-Sectional Technologies | 1 | Active |
| US8585830B2 | Substrate processing apparatus and substrate processing method | Physics | 1 | Active |
| US10623107B2 | Optical transmission device and method for controlling optical transmission device | Electricity | 1 | Active |
| US8356424B2 | Substrate processing method | Electricity | 1 | Active |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.