Inventor · Tokyo, JP

Wataru Sugimura

23Patents
4h-index
16Co-inventors
56Inventor score

Filing activity: Feb 25, 2004 → Feb 27, 2019

Most-cited inventions

PatentTitleAreaCited byStatus
US7700394B2 Method for manufacturing silicon wafer method Electricity 12 Expired
US7320731B2 Process for growing silicon single crystal and process for producing silicon wafer Chemistry; Metallurgy 11 Active
US7364618B2 Silicon wafer, method for manufacturing the same and method for growing silicon single crystals Chemistry; Metallurgy 5 Expired
US7435294B2 Method for manufacturing silicon single crystal, and silicon wafer Chemistry; Metallurgy 4 Expired
US7637997B2 Silicon wafer, method for producing silicon wafer and method for growing silicon single crystal Chemistry; Metallurgy 4 Expired
US7384480B2 Apparatus for manufacturing semiconductor single crystal Emerging Cross-Sectional Technologies 3 Active
US7306676B2 Apparatus for manufacturing semiconductor single crystal Emerging Cross-Sectional Technologies 2 Expired
US8617311B2 Silicon single crystal wafer for IGBT and method for manufacturing silicon single crystal wafer for IGBT Electricity 2 Active
US7628854B2 Process for producing silicon single crystal Chemistry; Metallurgy 2 Active
US7300517B2 Manufacturing method of hydrogen-doped silicon single crystal Chemistry; Metallurgy 2 Expired
US7374741B2 Method for growing silicon single crystal and silicon wafer Chemistry; Metallurgy 2 Active
US7790573B2 Process for producing SOI substrate and process for regeneration of layer transferred wafer in the production Electricity 1 Active
US11781242B2 Method for controlling convection pattern of silicon melt, method for producing silicon single crystals, and device for pulling silicon single crystals Chemistry; Metallurgy 1 Active
US11261540B2 Method of controlling convection patterns of silicon melt and method of manufacturing silicon single crystal Chemistry; Metallurgy 1 Active
US11186921B2 Method for controlling convection pattern of silicon melt and method for producing monocrystalline silicon Chemistry; Metallurgy 1 Active
US10858753B2 Method and apparatus for manufacturing silicon single crystal Chemistry; Metallurgy 1 Active
US11441238B2 Silicon monocrystal manufacturing method and silicon monocrystal pulling device Chemistry; Metallurgy 1 Active
US7704318B2 Silicon wafer, SOI substrate, method for growing silicon single crystal, method for manufacturing silicon wafer, and method for manufacturing SOI substrate Chemistry; Metallurgy 0 Expired
US11078595B2 Method of producing silicon single crystal ingot and silicon single crystal ingot Chemistry; Metallurgy 0 Active
US10415150B2 Apparatus for manufacturing silicon single crystal and melt inlet pipe of the same Emerging Cross-Sectional Technologies 0 Active
US11885038B2 Method of estimating convection pattern of silicon melt, method of estimating oxygen concentration of silicon single crystal, method of manufacturing silicon single crystal, and raising device of silicon single crystal Chemistry; Metallurgy 0 Active
US7824493B2 Silicon wafer and method for manufacturing the same Electricity 0 Expired
US8758505B2 Silicon wafer and method for manufacturing the same Electricity 0 Active

Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.