Daniel Flamm
36Patents
13h-index
46Co-inventors
81Inventor score
Filing activity: May 23, 1977 → Jan 25, 2024
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US4918031A | Processes depending on plasma generation using a helical resonator | Emerging Cross-Sectional Technologies | 178 | Expired |
| US4498953A | Etching techniques | Emerging Cross-Sectional Technologies | 166 | Expired |
| US4310380A | Plasma etching of silicon | Electricity | 85 | Expired |
| US6127275A | Process depending on plasma discharges sustained by inductive coupling | Electricity | 49 | Expired |
| US6017221A | Process depending on plasma discharges sustained by inductive coupling | Electricity | 47 | Expired |
| US5304282A | Processes depending on plasma discharges sustained in a helical resonator | Electricity | 40 | Expired |
| US4314875A | Device fabrication by plasma etching | Emerging Cross-Sectional Technologies | 32 | Expired |
| US4377436A | Plasma-assisted etch process with endpoint detection | Physics | 29 | Expired |
| US6858112B2 | Process depending on plasma discharges sustained by inductive coupling | Electricity | 24 | Expired |
| US4394237A | Spectroscopic monitoring of gas-solid processes | Chemistry; Metallurgy | 23 | Expired |
| US5980766A | Process optimization in gas phase dry etching | Electricity | 19 | Expired |
| US4397711A | Crystallographic etching of III-V semiconductor materials | Emerging Cross-Sectional Technologies | 18 | Expired |
| US5711849A | Process optimization in gas phase dry etching | Electricity | 14 | Expired |
| US6231776A | Multi-temperature processing | Electricity | 11 | Expired |
| US10620444B2 | Diffractive optical beam shaping element | Physics | 10 | Active |
| US4130490A | Electric discharge for treatment of trace contaminants | Emerging Cross-Sectional Technologies | 9 | Expired |
| US4960656A | Devices and process for producing devices containing silicon nitride films | Electricity | 8 | Expired |
| US10661384B2 | Optical system for beam shaping | Performing Operations; Transporting | 7 | Active |
| US4554047A | Downstream apparatus and technique | Electricity | 6 | Expired |
| US10882143B2 | System for asymmetric optical beam shaping | Physics | 6 | Active |
| US4372834A | Purification process for compounds useful in optical fiber manufacture | Chemistry; Metallurgy | 5 | Expired |
| US7593040B2 | Image anti-shake in digital cameras | Electricity | 4 | Active |
| USRE40264E1 | Multi-temperature processing | General | 3 | Expired |
| US11169387B2 | Optical assembly for variably generating a multi-focus profile | Physics | 2 | Active |
| US11150483B2 | Diffractive optical beam shaping element | Physics | 1 | Active |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.