Inventor · Pennington, NJ, US

Eric A. Armour

25Patents
7h-index
35Co-inventors
69Inventor score

Filing activity: Sep 25, 1991 → Apr 24, 2018

Most-cited inventions

PatentTitleAreaCited byStatus
US6001183A Wafer carriers for epitaxial growth processes Chemistry; Metallurgy 426 Expired
US10134617B2 Wafer carrier having thermal cover for chemical vapor deposition systems Emerging Cross-Sectional Technologies 351 Active
US8092599B2 Movable injectors in rotating disc gas reactors Chemistry; Metallurgy 16 Active
US5438585A Unstable resonator semiconductor laser Electricity 14 Expired
US8152923B2 Gas treatment systems Chemistry; Metallurgy 11 Active
US8603248B2 System and method for varying wafer surface temperature via wafer-carrier temperature offset Chemistry; Metallurgy 9 Active
US8287646B2 Gas treatment systems Chemistry; Metallurgy 8 Active
US8022372B2 Apparatus and method for batch non-contact material characterization Emerging Cross-Sectional Technologies 7 Active
US8198605B2 Apparatus and method for batch non-contact material characterization Emerging Cross-Sectional Technologies 4 Active
US5275686A Radial epitaxial reactor for multiple wafer growth Chemistry; Metallurgy 3 Expired
US9653340B2 Heated wafer carrier profiling Physics 3 Active
US8815709B2 Chemical vapor deposition with energy input Chemistry; Metallurgy 2 Active
US8980000B2 Density-matching alkyl push flow for vertical flow rotating disk reactors Chemistry; Metallurgy 1 Active
US8958061B2 Heated wafer carrier profiling Physics 1 Active
US9273395B2 Gas treatment systems Chemistry; Metallurgy 1 Active
US9938621B2 Methods of wafer processing with carrier extension Electricity 1 Active
US10364509B2 Alkyl push flow for vertical flow rotating disk reactors Chemistry; Metallurgy 0 Active
US10099185B2 Enhanced enclosures for acoustical gas concentration sensing and flow control Physics 0 Active
US10570510B2 Periphery purge shutter and flow control systems and methods Electricity 0 Active
US9748113B2 Method and apparatus for controlled dopant incorporation and activation in a chemical vapor deposition system Electricity 0 Active
US10167554B2 Wafer processing with carrier extension Electricity 0 Active
US9303319B2 Gas injection system for chemical vapor deposition using sequenced valves Chemistry; Metallurgy 0 Active
US9593434B2 Alkyl push flow for vertical flow rotating disk reactors Chemistry; Metallurgy 0 Active
US9982362B2 Density-matching alkyl push flow for vertical flow rotating disk reactors Chemistry; Metallurgy 0 Active
US8441653B2 Apparatus and method for batch non-contact material characterization Emerging Cross-Sectional Technologies 0 Active

Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.