Inventor · Cupertino, CA, US

Fufa Chen

27Patents
7h-index
38Co-inventors
69Inventor score

Filing activity: Jul 11, 1997 → Mar 9, 2023

Most-cited inventions

PatentTitleAreaCited byStatus
US6364949B1 300 mm CVD chamber design for metal-organic thin film deposition Chemistry; Metallurgy 317 Expired
US6220091A Liquid level pressure sensor and method Chemistry; Metallurgy 26 Expired
US6660135B2 Staged aluminum deposition process for filling vias Electricity 16 Expired
US6352620B2 Staged aluminum deposition process for filling vias Electricity 15 Expired
US6179277A Liquid vaporizer systems and methods for their use Chemistry; Metallurgy 14 Expired
US6436820B1 Method for the CVD deposition of a low residual halogen content multi-layered titanium nitride film having a combined thickness greater than 1000 å Chemistry; Metallurgy 14 Expired
US6086676A Programmable electrical interlock system for a vacuum processing system Chemistry; Metallurgy 8 Expired
US6221174A Method of performing titanium/titanium nitride integration Electricity 6 Expired
US6332601A Liquid vaporizers for semiconductor processing systems Chemistry; Metallurgy 3 Expired
US8580042B2 Methods and apparatus for cleaning semiconductor wafers Electricity 2 Active
US11141762B2 System for cleaning semiconductor wafers Physics 2 Active
US11581205B2 Methods and system for cleaning semiconductor wafers Electricity 1 Active
US10910244B2 Methods and system for cleaning semiconductor wafers Electricity 1 Active
US11257667B2 Methods and apparatus for cleaning semiconductor wafers Electricity 1 Active
US8671961B2 Methods and apparatus for cleaning semiconductor wafers Electricity 1 Active
US11037804B2 Methods and apparatus for cleaning substrates Emerging Cross-Sectional Technologies 1 Active
US11638937B2 Methods and apparatus for cleaning substrates Performing Operations; Transporting 0 Active
US11911807B2 Method and apparatus for cleaning substrates Performing Operations; Transporting 0 Active
US10816901B2 Coater with automatic cleaning function and coater automatic cleaning method Electricity 0 Active
US10770335B2 Substrate supporting apparatus Electricity 0 Active
US11752529B2 Method for cleaning semiconductor wafers Physics 0 Active
US12111575B2 Coater with automatic cleaning function and coater automatic cleaning method Electricity 0 Active
US11633765B2 System for cleaning semiconductor wafers Physics 0 Active
US11967497B2 Methods and apparatus for cleaning semiconductor wafers Electricity 0 Active
US11103898B2 Methods and apparatus for cleaning substrates Performing Operations; Transporting 0 Active

Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.