Inventor · Shanghai, CN

Fuping Chen

35Patents
2h-index
28Co-inventors
53Inventor score

Filing activity: Nov 27, 2012 → Feb 13, 2024

Most-cited inventions

PatentTitleAreaCited byStatus
US10410906B2 Substrate supporting apparatus Emerging Cross-Sectional Technologies 3 Active
US11141762B2 System for cleaning semiconductor wafers Physics 2 Active
US10297472B2 Method and apparatus for cleaning semiconductor wafer Electricity 2 Active
US11581205B2 Methods and system for cleaning semiconductor wafers Electricity 1 Active
US11037804B2 Methods and apparatus for cleaning substrates Emerging Cross-Sectional Technologies 1 Active
US11257667B2 Methods and apparatus for cleaning semiconductor wafers Electricity 1 Active
US10910244B2 Methods and system for cleaning semiconductor wafers Electricity 1 Active
US10113244B2 Method and apparatus for uniformly metallization on substrate Chemistry; Metallurgy 0 Active
US12186684B2 Method and apparatus for cleaning substrates using high temperature chemicals and ultrasonic device Mechanical Engineering; Lighting; Heating 0 Active
US11911807B2 Method and apparatus for cleaning substrates Performing Operations; Transporting 0 Active
US11752529B2 Method for cleaning semiconductor wafers Physics 0 Active
US12062556B2 Methods and apparatus for cleaning semiconductor wafers Electricity 0 Active
US11848217B2 Methods and apparatus for cleaning substrates Emerging Cross-Sectional Technologies 0 Active
US12334367B2 Method and apparatus for removing particles or photoresist on substrates Electricity 0 Active
US11629425B2 Method and apparatus for uniformly metallization on substrate Chemistry; Metallurgy 0 Active
US11854842B2 Substrate heat treatment apparatus Electricity 0 Active
US11955328B2 Method and apparatus for cleaning semiconductor wafer Electricity 0 Active
US11103898B2 Methods and apparatus for cleaning substrates Performing Operations; Transporting 0 Active
US10907266B2 Method and apparatus for uniformly metallization on substrate Chemistry; Metallurgy 0 Active
US11462423B2 Method and apparatus for cleaning semiconductor wafer Electricity 0 Active
US11967497B2 Methods and apparatus for cleaning semiconductor wafers Electricity 0 Active
US11335550B2 Method and apparatus for cleaning semiconductor wafer Electricity 0 Active
US11498100B2 Apparatus for cleaning semiconductor substrates Electricity 0 Active
US11633765B2 System for cleaning semiconductor wafers Physics 0 Active
US11876005B2 Methods and apparatus for cleaning flip chip assemblies Electricity 0 Active

Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.