Junichi Wada
73Patents
13h-index
106Co-inventors
87Inventor score
Filing activity: Mar 22, 1993 → Feb 9, 2021
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US5607718A | Polishing method and polishing apparatus | Electricity | 78 | Expired |
| US6071810A | Method of filling contact holes and wiring grooves of a semiconductor device | Electricity | 71 | Expired |
| US5775980A | Polishing method and polishing apparatus | Electricity | 66 | Expired |
| US6423192B1 | Sputtering apparatus and film forming method | Electricity | 60 | Expired |
| US6090701A | Method for production of semiconductor device | Electricity | 45 | Expired |
| US6229211A | Semiconductor device and method of manufacturing the same | Electricity | 44 | Expired |
| US5723367A | Wiring forming method | Electricity | 43 | Expired |
| US6306756A | Method for production of semiconductor device | Electricity | 42 | Expired |
| US5409862A | Method for making aluminum single crystal interconnections on insulators | Electricity | 38 | Expired |
| US9362487B2 | Ferroelectric memory and manufacturing method of the same | Electricity | 29 | Active |
| US6673704B2 | Semiconductor device and method of manufacturing the same | Electricity | 25 | Expired |
| US5661345A | Semiconductor device having a single-crystal metal wiring | Electricity | 20 | Expired |
| US8410467B2 | Nonvolatile memory device and method of manufacturing the same | Physics | 14 | Active |
| US7351656B2 | Semiconductor device having oxidized metal film and manufacture method of the same | Electricity | 13 | Expired |
| US8922018B2 | Semiconductor device and semiconductor device manufacturing method | Electricity | 11 | Active |
| US6518177B1 | Method of manufacturing a semiconductor device | Electricity | 10 | Expired |
| US6307267A | Semiconductor device and manufacturing method thereof | Electricity | 9 | Expired |
| US5692483A | Ignition coil used for an internal combustion engine | Electricity | 9 | Expired |
| US5981150A | Method for forming a resist pattern | Electricity | 9 | Expired |
| US6500686B2 | Hot plate and method of manufacturing semiconductor device | Electricity | 8 | Expired |
| US7996813B2 | Method for generating pattern, method for manufacturing semiconductor device, semiconductor device, and computer program | Physics | 7 | Active |
| US10600116B2 | Reservation management device, reservation management system, and reservation management method | Emerging Cross-Sectional Technologies | 7 | Active |
| US8569728B2 | Nonvolatile memory with variable resistance change layers | Physics | 6 | Active |
| US10650444B2 | Battery reservation device and battery reservation method | Emerging Cross-Sectional Technologies | 6 | Active |
| US9153779B2 | Resistance change memory element and resistance change memory | Physics | 6 | Active |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.