Inventor · Austin, TX, US

Peter Ventzek

60Patents
6h-index
38Co-inventors
72Inventor score

Filing activity: Apr 12, 1999 → May 22, 2024

Most-cited inventions

PatentTitleAreaCited byStatus
US10998169B2 Systems and methods of control for plasma processing Electricity 40 Active
US10991554B2 Plasma processing system with synchronized signal modulation Electricity 40 Active
US8889534B1 Solid state source introduction of dopants and additives for a plasma doping process Electricity 38 Active
US6165567A Process of forming a semiconductor device Chemistry; Metallurgy 18 Expired
US6139696A Method and apparatus for forming a layer on a substrate Electricity 10 Expired
US8636871B2 Plasma processing apparatus, plasma processing method and storage medium Electricity 10 Active
US6500315B1 Method and apparatus for forming a layer on a substrate Electricity 6 Expired
US11430643B2 Quantification of processing chamber species by electron energy sweep Electricity 4 Active
US11295937B2 Broadband plasma processing systems and methods Electricity 3 Active
US11348761B2 Impedance matching apparatus and control method Electricity 3 Active
US11170981B2 Broadband plasma processing systems and methods Electricity 2 Active
US11094543B1 Defect correction on metal resists Electricity 2 Active
US11342195B1 Methods for anisotropic etch of silicon-based materials with selectivity to organic materials Electricity 2 Active
US11393663B2 Methods and systems for focus ring thickness determinations and feedback control Electricity 1 Active
US11056347B2 Method for dry etching compound materials Emerging Cross-Sectional Technologies 1 Active
US11251021B2 Mode-switching plasma systems and methods of operating thereof Electricity 1 Active
US11264212B1 Ion angle detector Electricity 1 Active
US11605536B2 Cyclic low temperature film growth processes Electricity 1 Active
US11830709B2 Broadband plasma processing systems and methods Electricity 1 Active
US11201035B2 Radical source with contained plasma Electricity 1 Active
US9252001B2 Plasma processing apparatus, plasma processing method and storage medium Electricity 1 Active
US11393662B2 Apparatuses and methods for plasma processing Electricity 0 Active
US12014901B2 Tailored electron energy distribution function by new plasma source: hybrid electron beam and RF plasma Electricity 0 Active
US11557487B2 Etching metal during processing of a semiconductor structure Electricity 0 Active
US10340137B2 Monolayer film mediated precision film deposition Electricity 0 Active

Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.