Inventor · Hsinchu, TW

Sheng-Hsiung Chen

129Patents
15h-index
94Co-inventors
89Inventor score

Filing activity: Apr 3, 1995 → Jun 18, 2024

Most-cited inventions

PatentTitleAreaCited byStatus
US6399486B1 Method of improved copper gap fill Electricity 66 Expired
US6191023A Method of improving copper pad adhesion Electricity 58 Expired
US5635258A Method of forming a boron-doped diamond film by chemical vapor deposition Chemistry; Metallurgy 53 Expired
US6313003A Fabrication process for metal-insulator-metal capacitor with low gate resistance Electricity 40 Expired
US6560862B1 Modified pad for copper/low-k Emerging Cross-Sectional Technologies 35 Expired
US6489684B1 Reduction of electromigration in dual damascene connector Electricity 29 Expired
US6303498A Method for preventing seed layer oxidation for high aspect gap fill Electricity 28 Expired
US5660894A Process for depositing diamond by chemical vapor deposition Chemistry; Metallurgy 26 Expired
US6420258B1 Selective growth of copper for advanced metallization Electricity 26 Expired
US6350667B1 Method of improving pad metal adhesion Electricity 24 Expired
US6466427B1 Microelectronic capacitor structure compatible with copper containing microelectronic conductor layer processing Electricity 23 Expired
US6518166B1 Liquid phase deposition of a silicon oxide layer for use as a liner on the surface of a dual damascene opening in a low dielectric constant layer Electricity 22 Expired
US6872627B2 Selective formation of metal gate for dual gate oxide application Emerging Cross-Sectional Technologies 22 Expired
US6384442B1 Fabrication process for metal-insulator-metal capacitor with low gate resistance Electricity 20 Expired
US6303459A Integration process for Al pad Emerging Cross-Sectional Technologies 15 Expired
US6818533B2 Epitaxial plasma enhanced chemical vapor deposition (PECVD) method providing epitaxial layer with attenuated defects Electricity 15 Expired
US7026721B2 Method of improving copper pad adhesion Electricity 12 Expired
US6573187B1 Method of forming dual damascene structure Electricity 11 Expired
US6235637A Method for marking a wafer without inducing flat edge particle problem Electricity 8 Expired
US6660577B2 Method for fabricating metal gates in deep sub-micron devices Electricity 5 Expired
US11275886B2 Integrated circuit and method of forming same and a system Physics 5 Active
US10262981B2 Integrated circuit, system for and method of forming an integrated circuit Electricity 5 Active
US10396063B2 Circuit with combined cells and method for manufacturing the same Physics 5 Active
US10552568B2 Method of modifying cell and global connection routing method Physics 5 Active
US10990745B2 Integrated circuit and method of forming same and a system Physics 5 Active

Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.