Takuya Fukuda
56Patents
17h-index
83Co-inventors
87Inventor score
Filing activity: Jan 19, 1988 → Jan 4, 2023
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US6432769B1 | Semiconductor integrated circuit device and process for manufacture the same | Electricity | 112 | Expired |
| US6278148A | Semiconductor device having a shielding conductor | Electricity | 77 | Expired |
| US4876983A | Plasma operation apparatus | Electricity | 59 | Expired |
| US6258649A | Semiconductor integrated circuit device and method of manufacturing the same | Electricity | 56 | Expired |
| US5449411A | Microwave plasma processing apparatus | Emerging Cross-Sectional Technologies | 47 | Expired |
| US6255151A | Semiconductor integrated circuit device and method of manufacturing same | Electricity | 46 | Expired |
| US6215144A | Semiconductor integrated circuit device, and method of manufacturing the same | Electricity | 41 | Expired |
| US5211825A | Plasma processing apparatus and the method of the same | Electricity | 38 | Expired |
| US7588117B2 | Structure and method for mounting drive motor | Emerging Cross-Sectional Technologies | 34 | Expired |
| US5496410A | Plasma processing apparatus and method of processing substrates by using same apparatus | Chemistry; Metallurgy | 32 | Expired |
| US5552625A | Semiconductor device having a semi-insulating layer | Electricity | 25 | Expired |
| US5986299A | Semiconductor integrated circuit device having multi-level wiring capacitor structures | Electricity | 25 | Expired |
| US5745336A | Capacitor for semiconductor integrated circuit | Electricity | 21 | Expired |
| US6423992B1 | Semiconductor integrated circuit device | Electricity | 19 | Expired |
| US5162633A | Microwave-excited plasma processing apparatus | Electricity | 18 | Expired |
| US6399438B2 | Method of manufacturing semiconductor integrated circuit device having a capacitor | Electricity | 17 | Expired |
| US5084355A | Laminar structure comprising organic material and inorganic material | Emerging Cross-Sectional Technologies | 17 | Expired |
| US6303478A | Semiconductor integrated circuit device and method for fabricating the same | Electricity | 17 | Expired |
| US6360142B1 | Random work arranging device | Emerging Cross-Sectional Technologies | 15 | Expired |
| US8650965B2 | Robot, robot system, robot control device, and state determining method | Performing Operations; Transporting | 15 | Active |
| US5434742A | Capacitor for semiconductor integrated circuit and method of manufacturing the same | Electricity | 13 | Expired |
| US6576946B1 | Semiconductor device comprising capacitor cells, bit lines, word lines, and MOS transistors in a memory cell area over a semiconductor substrate | Electricity | 13 | Expired |
| US6479899B1 | Semiconductor integrated circuit device and process for manufacturing the same | Electricity | 12 | Expired |
| US5182495A | Plasma processing method and apparatus using electron cyclotron resonance | Electricity | 9 | Expired |
| US5347100A | Semiconductor device, process for the production thereof and apparatus for microwave plasma treatment | Electricity | 7 | Expired |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.