Inventor · Tokyo, JP

Toshihide Nabatame

41Patents
10h-index
59Co-inventors
78Inventor score

Filing activity: Oct 6, 1987 → Aug 23, 2018

Most-cited inventions

PatentTitleAreaCited byStatus
US6198119A Ferroelectric element and method of producing the same Electricity 56 Expired
US6777248B1 Dielectric element and manufacturing method therefor Electricity 55 Expired
US4848983A Catalytic coal gasification by utilizing chlorides Emerging Cross-Sectional Technologies 47 Expired
US6743739B2 Fabrication method for semiconductor integrated devices Electricity 27 Expired
US5849670A Thallium group superconducting wire Emerging Cross-Sectional Technologies 18 Expired
US7387686B2 Film formation apparatus Electricity 11 Expired
US7586755B2 Electronic circuit component Electricity 11 Active
US6503791B2 Method of manufacturing semiconductor devices utilizing underlayer-dependency of deposition of capacitor electrode film, and semiconductor device Electricity 11 Expired
US5318948A Oxide superconductor, superconducting wire and coil using the same and method of production thereof Emerging Cross-Sectional Technologies 11 Expired
US6992022B2 Fabrication method for semiconductor integrated devices Electricity 10 Expired
US6555429B2 Method of manufacturing semiconductor devices utilizing underlayer-dependency of deposition of capacitor electrode film, and semiconductor device Electricity 9 Expired
US7294905B2 Thin film capacitor and electronic circuit component Electricity 9 Expired
US6548342B1 Method of producing oxide dielectric element, and memory and semiconductor device using the element Electricity 8 Expired
US6483143B2 Semiconductor device having a capacitor structure including a self-alignment deposition preventing film Electricity 7 Expired
US6483167B1 Semiconductor device and production method thereof Electricity 4 Expired
US7259058B2 Fabricating method of semiconductor integrated circuits Electricity 3 Expired
US8207584B2 Semiconductor device and manufacturing method of the same Electricity 3 Active
US9741864B2 Thin-film transistor and method for manufacturing same Electricity 3 Active
US8168547B2 Manufacturing method of semiconductor device Electricity 3 Active
US6521494B2 Method of manufacturing semiconductor devices utilizing underlayer-dependency of deposition of capacitor electrode film, and semiconductor device Electricity 3 Expired
US7482234B2 Method of fabricating a metal oxynitride thin film that includes a first annealing of a metal oxide film in a nitrogen-containing atmosphere to form a metal oxynitride film and a second annealing of the metal oxynitride film in an oxidizing atmosphere Electricity 3 Expired
US8575038B2 Method for reducing thickness of interfacial layer, method for forming high dielectric constant gate insulating film, high dielectric constant gate insulating film, high dielectric constant gate oxide film, and transistor having high dielectric constant gate oxide film Electricity 3 Active
US7618855B2 Manufacturing method of semiconductor device Electricity 2 Active
US7372112B2 Semiconductor device, process for producing the same and process for producing metal compound thin film Electricity 2 Expired
US7772678B2 Metallic compound thin film that contains high-k dielectric metal, nitrogen, and oxygen Electricity 2 Active

Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.