Inventor · Santa Clara, CA, US

Bhaskar Kumar

26Patents
2h-index
47Co-inventors
53Inventor score

Filing activity: Jun 9, 2009 → Jun 27, 2023

Most-cited inventions

PatentTitleAreaCited byStatus
US8846437B2 High efficiency thin film transistor device with gallium arsenide layer Emerging Cross-Sectional Technologies 9 Active
US9646876B2 Aluminum nitride barrier layer Electricity 8 Active
US9252392B2 Thin film encapsulation-thin ultra high barrier layer for OLED application Electricity 2 Active
US10074559B1 Selective poreseal deposition prevention and residue removal using SAM Electricity 2 Active
US11488811B2 Chucking process and system for substrate processing chambers Electricity 1 Active
US9793108B2 Interconnect integration for sidewall pore seal and via cleanliness Electricity 1 Active
US11069514B2 Remote capacitively coupled plasma source with improved ion blocker Electricity 1 Active
US10748797B2 Plasma parameters and skew characterization by high speed imaging Electricity 1 Active
US11721545B2 Method of using dual frequency RF power in a process chamber Electricity 1 Active
US11699585B2 Methods of forming hardmasks Electricity 0 Active
US11996273B2 Methods of seasoning process chambers Electricity 0 Active
US11120976B2 Apparatus and methods for removing contaminant particles in a plasma process Electricity 0 Active
US10892143B2 Technique to prevent aluminum fluoride build up on the heater Electricity 0 Active
US11959174B2 Shunt door for magnets in plasma process chamber Electricity 0 Active
US11545376B2 Plasma parameters and skew characterization by high speed imaging Electricity 0 Active
US11515191B2 Graded dimple height pattern on heater for lower backside damage and low chucking voltage Electricity 0 Active
US12142468B2 Stress treatments for cover wafers Electricity 0 Active
US10790121B2 Plasma density control on substrate edge Electricity 0 Active
US8895842B2 High quality TCO-silicon interface contact structure for high efficiency thin film silicon solar cells Emerging Cross-Sectional Technologies 0 Active
US10688538B2 Aluminum fluoride mitigation by plasma treatment Electricity 0 Active
US10714319B2 Apparatus and methods for removing contaminant particles in a plasma process Electricity 0 Active
US9780223B2 Gallium arsenide based materials used in thin film transistor applications Emerging Cross-Sectional Technologies 0 Active
US12020911B2 Chucking process and system for substrate processing chambers Electricity 0 Active
US12106958B2 Method of using dual frequency RF power in a process chamber Electricity 0 Active
US11859275B2 Techniques to improve adhesion and defects for tungsten carbide film Electricity 0 Active

Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.