Manabu Iguchi
20Patents
7h-index
33Co-inventors
65Inventor score
Filing activity: Oct 8, 1998 → Aug 23, 2012
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US6841880B2 | Semiconductor device and method of fabricating semiconductor device with high CMP uniformity and resistance to loss that occurs in dicing | Electricity | 197 | Expired |
| US6225697A | Semiconductor device and method for manufacturing the same | Electricity | 42 | Expired |
| US6876064B2 | Semiconductor device having superior resistance to moisture | Electricity | 18 | Expired |
| US6149730A | Apparatus for forming films of a semiconductor device, a method of manufacturing a semiconductor device, and a method of forming thin films of a semiconductor | Electricity | 18 | Expired |
| US7138700B2 | Semiconductor device with guard ring for preventing water from entering circuit region from outside | Electricity | 16 | Expired |
| US6376363B1 | Forming method of copper interconnection and semiconductor wafer with copper interconnection formed thereon | Electricity | 13 | Expired |
| US6379782B2 | Semiconductor device formed with metal wiring on a wafer by chemical mechanical polishing, and method of manufacturing the same | Emerging Cross-Sectional Technologies | 8 | Expired |
| US9337093B2 | Method of manufacturing semiconductor device | Electricity | 7 | Active |
| US7019400B2 | Semiconductor device having multilayer interconnection structure and method for manufacturing the device | Electricity | 7 | Expired |
| US8946800B2 | Semiconductor device with protective layer and method of manufacturing same | Electricity | 7 | Active |
| US6458690B2 | Method for manufacturing a multilayer interconnection structure | Electricity | 4 | Expired |
| US7358609B2 | Semiconductor device | Electricity | 3 | Expired |
| US6555911B1 | Semiconductor device and method of manufacturing interconnections thereof using copper and tungsten in predetermined ratios | Electricity | 3 | Expired |
| US8158446B2 | Semiconductor device and method of manufacturing the same | Electricity | 1 | Active |
| US8487305B2 | Semiconductor device and method of manufacturing the same | Electricity | 0 | Active |
| US7601640B2 | Method of manfacturing semiconductor device | Electricity | 0 | Active |
| US6861759B2 | Semiconductor apparatus of which reliability of interconnections is improved and manufacturing method of the same | Electricity | 0 | Expired |
| US8329584B2 | Method of manufacturing semiconductor device | Electricity | 0 | Active |
| US7955980B2 | Method of manufacturing semiconductor device | Electricity | 0 | Active |
| US7052994B2 | Method for manufacturing semiconductor device, and processing system and semiconductor device | Electricity | 0 | Expired |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.