Inventor · Yokohama, JP

Manabu Iguchi

20Patents
7h-index
33Co-inventors
65Inventor score

Filing activity: Oct 8, 1998 → Aug 23, 2012

Most-cited inventions

PatentTitleAreaCited byStatus
US6841880B2 Semiconductor device and method of fabricating semiconductor device with high CMP uniformity and resistance to loss that occurs in dicing Electricity 197 Expired
US6225697A Semiconductor device and method for manufacturing the same Electricity 42 Expired
US6876064B2 Semiconductor device having superior resistance to moisture Electricity 18 Expired
US6149730A Apparatus for forming films of a semiconductor device, a method of manufacturing a semiconductor device, and a method of forming thin films of a semiconductor Electricity 18 Expired
US7138700B2 Semiconductor device with guard ring for preventing water from entering circuit region from outside Electricity 16 Expired
US6376363B1 Forming method of copper interconnection and semiconductor wafer with copper interconnection formed thereon Electricity 13 Expired
US6379782B2 Semiconductor device formed with metal wiring on a wafer by chemical mechanical polishing, and method of manufacturing the same Emerging Cross-Sectional Technologies 8 Expired
US9337093B2 Method of manufacturing semiconductor device Electricity 7 Active
US7019400B2 Semiconductor device having multilayer interconnection structure and method for manufacturing the device Electricity 7 Expired
US8946800B2 Semiconductor device with protective layer and method of manufacturing same Electricity 7 Active
US6458690B2 Method for manufacturing a multilayer interconnection structure Electricity 4 Expired
US7358609B2 Semiconductor device Electricity 3 Expired
US6555911B1 Semiconductor device and method of manufacturing interconnections thereof using copper and tungsten in predetermined ratios Electricity 3 Expired
US8158446B2 Semiconductor device and method of manufacturing the same Electricity 1 Active
US8487305B2 Semiconductor device and method of manufacturing the same Electricity 0 Active
US7601640B2 Method of manfacturing semiconductor device Electricity 0 Active
US6861759B2 Semiconductor apparatus of which reliability of interconnections is improved and manufacturing method of the same Electricity 0 Expired
US8329584B2 Method of manufacturing semiconductor device Electricity 0 Active
US7955980B2 Method of manufacturing semiconductor device Electricity 0 Active
US7052994B2 Method for manufacturing semiconductor device, and processing system and semiconductor device Electricity 0 Expired

Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.