Inventor · Phoenix, AZ, US

Matthias Bauer

60Patents
15h-index
66Co-inventors
87Inventor score

Filing activity: Oct 10, 2003 → Feb 23, 2023

Most-cited inventions

PatentTitleAreaCited byStatus
US8367528B2 Cyclical epitaxial deposition and etch Electricity 557 Active
US8278176B2 Selective epitaxial formation of semiconductor films Electricity 540 Active
US7939447B2 Inhibitors for selective deposition of silicon containing films Electricity 510 Active
US8809170B2 High throughput cyclical epitaxial deposition and etch process Electricity 402 Active
US7208354B2 Deposition of silicon germanium on silicon-on-insulator structures and bulk substrates Electricity 109 Expired
US7863163B2 Epitaxial deposition of doped semiconductor materials Electricity 107 Active
US7816236B2 Selective deposition of silicon-containing films Electricity 36 Active
US9312131B2 Selective epitaxial formation of semiconductive films Electricity 35 Active
US7238595B2 Epitaxial semiconductor deposition methods and structures Electricity 33 Expired
US7438760B2 Methods of making substitutionally carbon-doped crystalline Si-containing materials by chemical vapor deposition Electricity 29 Expired
US7329593B2 Germanium deposition Emerging Cross-Sectional Technologies 25 Expired
US6975935B2 Method and device for monitoring the direction of rotation of a piston engine Mechanical Engineering; Lighting; Heating 22 Expired
US9853129B2 Forming non-line-of-sight source drain extension in an nMOS finFET using n-doped selective epitaxial growth Electricity 17 Active
US7402504B2 Epitaxial semiconductor deposition methods and structures Electricity 16 Active
US7682947B2 Epitaxial semiconductor deposition methods and structures Electricity 15 Active
US7115521B2 Epitaxial semiconductor deposition methods and structures Electricity 15 Expired
US7479443B2 Germanium deposition Emerging Cross-Sectional Technologies 15 Active
US8728239B2 Methods and apparatus for a gas panel with constant gas flow Emerging Cross-Sectional Technologies 13 Active
US8844571B2 Fluid actuator for producing a pulsed outlet flow in the flow around an aerodynamic body, and discharge device and aerodynamic body equipped therewith Emerging Cross-Sectional Technologies 13 Active
US9573679B2 Fluid actuator for influencing the flow along a flow surface, as well as blow-out device and flow body comprising a like fluid actuator Emerging Cross-Sectional Technologies 12 Active
US9618150B2 Device for generating fluid pulses Emerging Cross-Sectional Technologies 11 Active
US7289865B2 Optimization algorithm to optimize within substrate uniformities Electricity 9 Expired
US7514372B2 Epitaxial growth of relaxed silicon germanium layers Electricity 8 Expired
US7687383B2 Methods of depositing electrically active doped crystalline Si-containing films Electricity 8 Active
US7648853B2 Dual channel heterostructure Electricity 6 Active

Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.