Inventor · Meylan, FR

Olivier Joubert

30Patents
8h-index
67Co-inventors
78Inventor score

Filing activity: Jun 23, 1998 → Nov 10, 2022

Most-cited inventions

PatentTitleAreaCited byStatus
USD797691S1 Composite edge ring General 45 Active
US10312048B2 Creating ion energy distribution functions (IEDF) Electricity 39 Active
US10685807B2 Creating ion energy distribution functions (IEDF) Electricity 32 Active
US6271144A Process for etching a polycrystalline Si(1-x)Ge(x) layer or a stack of polycrystalline Si(1-x)Ge(x) layer and of a polycrystalline Si layer, and its application to microelectronics Electricity 18 Expired
US9570317B2 Microelectronic method for etching a layer Electricity 11 Active
US6326302A Process for the anisotropic etching of an organic dielectric polymer material by a plasma gas and application in microelectronics Electricity 8 Expired
US9378970B2 Plasma etching process Electricity 8 Active
US9257293B2 Methods of forming silicon nitride spacers Electricity 8 Active
US6238844A Process for depositing a plasma polymerized organosilicon photoresist film Electricity 6 Expired
US9975758B2 Wafer processing equipment having exposable sensing layers Performing Operations; Transporting 6 Active
US9725302B1 Wafer processing equipment having exposable sensing layers Performing Operations; Transporting 5 Active
US6589715B2 Process for depositing and developing a plasma polymerized organosilicon photoresist film Electricity 5 Expired
US6818488B2 Process for making a gate for a short channel CMOS transistor structure Electricity 4 Expired
US9583339B2 Method for forming spacers for a transistor gate Electricity 3 Active
US11069504B2 Creating ion energy distribution functions (IEDF) Electricity 3 Active
US10062602B2 Method of etching a porous dielectric material Electricity 3 Active
US10056266B2 Method for manufacturing a resistive device for a memory or logic circuit Electricity 3 Active
US8546263B2 Method of patterning of magnetic tunnel junctions Electricity 3 Active
US9059400B2 Magnetic random access memory cells with isolating liners Electricity 2 Active
US11728124B2 Creating ion energy distribution functions (IEDF) Electricity 2 Active
US8956886B2 Embedded test structure for trimming process control Electricity 2 Active
US9818621B2 Cyclic oxide spacer etch process Electricity 2 Active
US7723610B2 Titanium oxide-based sol-gel polymer Chemistry; Metallurgy 0 Active
US12237149B2 Reducing aspect ratio dependent etch with direct current bias pulsing Electricity 0 Active
US11208354B2 Sintered zirconia mullite refractory composite, methods for its production and use thereof Chemistry; Metallurgy 0 Active

Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.