Shinichi Tachi
46Patents
20h-index
41Co-inventors
85Inventor score
Filing activity: Dec 21, 1982 → Apr 1, 2003
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US5242539A | Plasma treatment method and apparatus | Electricity | 558 | Expired |
| US4985114A | Dry etching by alternately etching and depositing | Emerging Cross-Sectional Technologies | 545 | Expired |
| US4857137A | Process for surface treatment | Electricity | 497 | Expired |
| US4992136A | Dry etching method | Electricity | 233 | Expired |
| US6197151A | Plasma processing apparatus and plasma processing method | Electricity | 180 | Expired |
| US5368685A | Dry etching apparatus and method | Electricity | 98 | Expired |
| US5499207A | Semiconductor memory device having improved isolation between electrodes, and process for fabricating the same | Emerging Cross-Sectional Technologies | 61 | Expired |
| US5354416A | Dry etching method | Electricity | 56 | Expired |
| US4529476A | Gas for selectively etching silicon nitride and process for selectively etching silicon nitride with the gas | Electricity | 52 | Expired |
| US6129806A | Plasma processing apparatus and plasma processing method | Electricity | 49 | Expired |
| US4911812A | Plasma treating method and apparatus therefor | Electricity | 36 | Expired |
| US4956043A | Dry etching apparatus | Electricity | 36 | Expired |
| US4943344A | Etching method | Electricity | 31 | Expired |
| US4986877A | Method of dry etching | Electricity | 30 | Expired |
| US5474650A | Method and apparatus for dry etching | Emerging Cross-Sectional Technologies | 28 | Expired |
| US6136214A | Plasma processing method and apparatus | Electricity | 27 | Expired |
| US6033481A | Plasma processing apparatus | Electricity | 27 | Expired |
| US6551445B1 | Plasma processing system and method for manufacturing a semiconductor device by using the same | Electricity | 26 | Expired |
| US5891252A | Plasma processing apparatus | Electricity | 25 | Expired |
| US5147500A | Dry etching method | Electricity | 24 | Expired |
| US6842658B2 | Method of manufacturing a semiconductor device and manufacturing system | Emerging Cross-Sectional Technologies | 19 | Expired |
| US5343353A | Semiconductor device and process of producing the same | Emerging Cross-Sectional Technologies | 18 | Expired |
| US6902683B1 | Plasma processing apparatus and plasma processing method | Electricity | 13 | Expired |
| US5643473A | Dry etching method | Electricity | 12 | Expired |
| US5736449A | Semiconductor memory device having improved isolation between electrodes, and process for fabricating the same | Emerging Cross-Sectional Technologies | 12 | Expired |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.