Inventor · Beacon, NY, US

Christopher C. Parks

32Patents
10h-index
84Co-inventors
78Inventor score

Filing activity: Apr 29, 1991 → Feb 22, 2018

Most-cited inventions

PatentTitleAreaCited byStatus
US6268291A Method for forming electromigration-resistant structures by doping Electricity 114 Expired
US6123825A Electromigration-resistant copper microstructure and process of making Emerging Cross-Sectional Technologies 60 Expired
US5998253A Method of forming a dopant outdiffusion control structure including selectively grown silicon nitride in a trench capacitor of a DRAM cell Electricity 33 Expired
US5192708A Sub-layer contact technique using in situ doped amorphous silicon and solid phase recrystallization Emerging Cross-Sectional Technologies 33 Expired
US6057220A Titanium polycide stabilization with a porous barrier Electricity 26 Expired
US6589874B2 Method for forming electromigration-resistant structures by doping Electricity 23 Expired
US6890833B2 Trench isolation employing a doped oxide trench fill Electricity 15 Expired
US6358855B1 Clean method for recessed conductive barriers Electricity 14 Expired
US5793075A Deep trench cell capacitor with inverting counter electrode Electricity 14 Expired
US5907777A Method for forming field effect transistors having different threshold voltages and devices formed thereby Electricity 13 Expired
US7276796B1 Formation of oxidation-resistant seed layer for interconnect applications Electricity 8 Expired
US6572982B1 Electromigration-resistant copper microstructure Emerging Cross-Sectional Technologies 8 Expired
US6194736A Quantum conductive recrystallization barrier layers Electricity 8 Expired
US7585765B2 Formation of oxidation-resistant seed layer for interconnect applications Electricity 8 Active
US8969197B2 Copper interconnect structure and its formation Electricity 6 Active
US6265278A Deep trench cell capacitor with inverting counter electrode Electricity 6 Expired
US5374481A Polyemitter structure with improved interface control Emerging Cross-Sectional Technologies 4 Expired
US8415772B2 Method to prevent surface decomposition of III-V compound semiconductors Electricity 3 Active
US6764551B2 Process for removing dopant ions from a substrate Performing Operations; Transporting 2 Expired
US7843067B2 Method and structure of integrated rhodium contacts with copper interconnects Emerging Cross-Sectional Technologies 1 Active
US6797582B2 Vertical thermal nitride mask (anti-collar) and processing thereof Electricity 1 Expired
US6399434B1 Doped structures containing diffusion barriers Electricity 1 Expired
US8431476B2 Method to prevent surface decomposition of III-V compound semiconductors Electricity 1 Active
US7227265B2 Electroplated copper interconnection structure, process for making and electroplating bath Chemistry; Metallurgy 0 Expired
US8563446B2 Technique to create a buried plate in embedded dynamic random access memory device Emerging Cross-Sectional Technologies 0 Active

Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.