Inventor · Saratoga, CA, US

Harsono S. Simka

32Patents
6h-index
59Co-inventors
68Inventor score

Filing activity: Feb 6, 2004 → Dec 17, 2021

Most-cited inventions

PatentTitleAreaCited byStatus
US7220671B2 Organometallic precursors for the chemical phase deposition of metal films in interconnect applications Electricity 46 Expired
US7682891B2 Tunable gate electrode work function material for transistor applications Electricity 16 Active
US7470617B2 Treating a liner layer to reduce surface oxides Electricity 13 Active
US9932671B2 Precursor and process design for photo-assisted metal atomic layer deposition (ALD) and chemical vapor deposition (CVD) Electricity 8 Active
US7354849B2 Catalytically enhanced atomic layer deposition process Electricity 8 Expired
US7851360B2 Organometallic precursors for seed/barrier processes and methods thereof Electricity 7 Active
US8779589B2 Liner layers for metal interconnects Electricity 6 Active
US8319287B2 Tunable gate electrode work function material for transistor applications Electricity 6 Active
US10957579B2 Integrated circuit devices including a via and methods of forming the same Electricity 5 Active
US7858525B2 Fluorine-free precursors and methods for the deposition of conformal conductive films for nanointerconnect seed and fill Electricity 4 Active
US7279084B2 Apparatus having plating solution container with current applying anodes Chemistry; Metallurgy 4 Expired
US7964746B2 Copper precursors for CVD/ALD/digital CVD of copper metal films Chemistry; Metallurgy 3 Active
US11043454B2 Low resistivity interconnects with doped barrier layer for integrated circuits Electricity 3 Active
US7476615B2 Deposition process for iodine-doped ruthenium barrier layers Electricity 2 Active
US8425987B2 Surface charge enhanced atomic layer deposition of pure metallic films Chemistry; Metallurgy 2 Active
US7749906B2 Using unstable nitrides to form semiconductor structures Emerging Cross-Sectional Technologies 2 Active
US11537898B2 Generative structure-property inverse computational co-design of materials Physics 2 Active
US10381315B2 Method and system for providing a reverse-engineering resistant hardware embedded security module Electricity 1 Active
US11087055B2 Method of screening materials using forward conducting modes Physics 1 Active
US7524765B2 Direct tailoring of the composition and density of ALD films Electricity 1 Active
US7704895B2 Deposition method for high-k dielectric materials Electricity 1 Active
US11769686B2 Methods and apparatus for electroless plating dispense Chemistry; Metallurgy 0 Active
US8344352B2 Using unstable nitrides to form semiconductor structures Emerging Cross-Sectional Technologies 0 Active
US10763207B2 Interconnects having long grains and methods of manufacturing the same Electricity 0 Active
US10825723B2 Semiconductor device and method for making the same Electricity 0 Active

Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.