Inventor · Pawling, NY, US

Henning Haffner

40Patents
8h-index
61Co-inventors
74Inventor score

Filing activity: Oct 21, 1999 → Aug 21, 2017

Most-cited inventions

PatentTitleAreaCited byStatus
US6421820B1 Semiconductor device fabrication using a photomask with assist features Physics 249 Expired
US6426269B1 Dummy feature reduction using optical proximity effect correction Physics 197 Expired
US6631511B2 Generating mask layout data for simulation of lithographic processes Physics 40 Expired
US7785946B2 Integrated circuits and methods of design and manufacture thereof Electricity 19 Active
US8365108B2 Generating cut mask for double-patterning process Physics 16 Active
US6232154A Optimized decoupling capacitor using lithographic dummy filler Electricity 14 Expired
US6571383B1 Semiconductor device fabrication using a photomask designed using modeling and empirical testing Emerging Cross-Sectional Technologies 13 Expired
US7221788B2 Method of inspecting a mask or reticle for detecting a defect, and mask or reticle inspection system Physics 10 Expired
US8161421B2 Calibration and verification structures for use in optical proximity correction Physics 7 Active
US7094674B2 Method for production of contacts on a wafer Electricity 7 Expired
US7947431B2 Lithography masks and methods of manufacture thereof Emerging Cross-Sectional Technologies 6 Active
US6353248B1 Optimized decoupling capacitor using lithographic dummy filler Electricity 6 Expired
US8099684B2 Methodology of placing printing assist feature for random mask layout Physics 5 Active
US7945869B2 Mask and method for patterning a semiconductor wafer Physics 3 Active
US6436585B1 Method of using optical proximity effects to create electrically blown fuses with sub-critical dimension neck downs Electricity 3 Expired
US6756164B2 Exposure mask with repaired dummy structure and method of repairing an exposure mask Physics 3 Expired
US7354684B2 Test pattern and method of evaluating the transfer properties of a test pattern Physics 3 Active
US8078998B2 Integrated circuits and methods of design and manufacture thereof Electricity 3 Active
US8039203B2 Integrated circuits and methods of design and manufacture thereof Emerging Cross-Sectional Technologies 3 Active
US7669173B2 Semiconductor mask and method of making same Physics 3 Active
US8071261B2 Lithography masks and methods of manufacture thereof Physics 3 Active
US8809958B2 Integrated circuits and methods of design and manufacture thereof Electricity 2 Active
US7304721B2 Method for dynamically monitoring a reticle Physics 2 Expired
US8715909B2 Lithography systems and methods of manufacturing using thereof Physics 2 Active
US9767244B2 Integrated circuits and methods of design and manufacture thereof Electricity 1 Active

Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.