Inventor · San Jose, CA, US

Hung-Eil Kim

26Patents
9h-index
25Co-inventors
71Inventor score

Filing activity: Aug 29, 1994 → Mar 25, 2008

Most-cited inventions

PatentTitleAreaCited byStatus
US7207017B1 Method and system for metrology recipe generation and review and analysis of design, simulation and metrology results Physics 60 Expired
US6581023B1 Accurate contact critical dimension measurement using variable threshold method Electricity 31 Expired
US7194725B1 System and method for design rule creation and selection Emerging Cross-Sectional Technologies 29 Expired
US7065738B1 Method of verifying an optical proximity correction (OPC) model Physics 29 Expired
US5583069A Method for making a fine annular charge storage electrode in a semiconductor device using a phase-shift mask Emerging Cross-Sectional Technologies 22 Expired
US7313769B1 Optimizing an integrated circuit layout by taking into consideration layout interactions as well as extra manufacturability margin Physics 21 Expired
US6544699B1 Method to improve accuracy of model-based optical proximity correction Physics 17 Expired
US7269804B2 System and method for integrated circuit device design and manufacture using optical rule checking to screen resolution enhancement techniques Physics 17 Expired
US7422828B1 Mask CD measurement monitor outside of the pellicle area Electricity 10 Expired
US5897975A Phase shift mask for formation of contact holes having micro dimension Physics 8 Expired
US5756235A Phase shift mask and method for fabricating the same Physics 8 Expired
US7507661B2 Method of forming narrowly spaced flash memory contact openings and lithography masks Emerging Cross-Sectional Technologies 5 Expired
US7018922B1 Patterning for elongated VSS contact flash memory Electricity 4 Expired
US6900124B1 Patterning for elliptical Vss contact on flash memory Electricity 4 Expired
US6593039B1 Photoresist mask that combines attenuated and alternating phase shifting masks Physics 3 Expired
US7384725B2 System and method for fabricating contact holes Physics 3 Expired
US7657864B2 System and method for integrated circuit device design and manufacture using optical rule checking to screen resolution enhancement techniques Physics 3 Active
US7368225B1 Two mask photoresist exposure pattern for dense and isolated regions Electricity 3 Expired
US7543256B1 System and method for designing an integrated circuit device Physics 2 Active
US5817437A Method for detecting phase error of a phase shift mask Physics 2 Expired
US6576376B1 Tri-tone mask process for dense and isolated patterns Physics 2 Expired
US5498497A Method for manufacturing a phase shift mask Physics 1 Expired
US7788609B2 Method and apparatus for optimizing an optical proximity correction model Physics 1 Active
US6566020B2 Dark field trench in an alternating phase shift mask to avoid phase conflict Physics 1 Expired
US8003545B2 Method of forming an electronic device including forming features within a mask and a selective removal process Electricity 0 Active

Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.