Mitsuru Taguchi
24Patents
11h-index
32Co-inventors
75Inventor score
Filing activity: Dec 13, 1974 → Jun 17, 2010
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US6361662B1 | Method for fabricating a semiconductor device in a magnetron sputtering system | Electricity | 47 | Expired |
| US6380065B1 | Interconnection structure and fabrication process therefor | Electricity | 39 | Expired |
| US5308793A | Method for forming interconnector | Electricity | 32 | Expired |
| US5719446A | Multilayer interconnect structure for semiconductor device and method of manufacturing same | Emerging Cross-Sectional Technologies | 31 | Expired |
| US5063833A | Air spout device for a ventilating arrangement | Performing Operations; Transporting | 27 | Expired |
| US5985747A | Semiconductor device manufacturing method | Electricity | 18 | Expired |
| US6593246B1 | Process for producing semiconductor device | Electricity | 15 | Expired |
| US6191031A | Process for producing multi-layer wiring structure | Electricity | 14 | Expired |
| US6306761A | Method of manufacturing semiconductor device | Emerging Cross-Sectional Technologies | 14 | Expired |
| US5776830A | Process for fabricating connection structures | Electricity | 13 | Expired |
| US6333258A | Method of manufacturing a semiconductor device | Electricity | 12 | Expired |
| US6709979B2 | Method of manufacturing a semiconductor device | Electricity | 11 | Expired |
| US5137491A | Air spout device for air conditioning system for use in automotive vehicle | Performing Operations; Transporting | 9 | Expired |
| US6268290A | Method of forming wirings | Electricity | 9 | Expired |
| US6645852B1 | Process for fabricating a semiconductor device having recess portion | Emerging Cross-Sectional Technologies | 8 | Expired |
| US6051490A | Method of forming wirings | Electricity | 7 | Expired |
| US6878632B2 | Semiconductor device having a conductive layer with a cobalt tungsten phosphorus coating and a manufacturing method thereof | Electricity | 7 | Expired |
| US6197686A | Aluminum metallization by a barrier metal process | Electricity | 7 | Expired |
| US6602787B2 | Method for fabricating semiconductor devices | Electricity | 3 | Expired |
| US6465342B1 | Semiconductor device and its manufacturing method | Electricity | 3 | Expired |
| US6736699B2 | Electrolytic polishing apparatus, electrolytic polishing method and wafer subject to polishing | Emerging Cross-Sectional Technologies | 2 | Expired |
| US3992174A | Specimen capsule and process for gas chromatography | Physics | 2 | Expired |
| USRE40748E1 | Process for producing semiconductor device | General | 0 | Expired |
| US9206531B2 | Iodine- and amylose-containing fibers, method for production thereof, and use thereof | Textiles; Paper | 0 | Active |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.