Inventor · San Jose, CA, US

Philip Allan Kraus

110Patents
13h-index
172Co-inventors
89Inventor score

Filing activity: Jun 12, 2002 → Jul 9, 2024

Most-cited inventions

PatentTitleAreaCited byStatus
US10373804B2 System for tunable workpiece biasing in a plasma reactor Electricity 74 Active
US10510575B2 Substrate support with multiple embedded electrodes Electricity 50 Active
US6831021B2 Plasma method and apparatus for processing a substrate Electricity 42 Expired
US10312048B2 Creating ion energy distribution functions (IEDF) Electricity 39 Active
US10904996B2 Substrate support with electrically floating power supply Electricity 38 Active
US10811296B2 Substrate support with dual embedded electrodes Electricity 38 Active
US10714372B2 System for coupling a voltage to portions of a substrate Electricity 36 Active
US10763150B2 System for coupling a voltage to spatially segmented portions of the wafer with variable voltage Electricity 36 Active
US7179754B2 Method and apparatus for plasma nitridation of gate dielectrics using amplitude modulated radio-frequency energy Electricity 33 Expired
US10685807B2 Creating ion energy distribution functions (IEDF) Electricity 32 Active
US10923320B2 System for tunable workpiece biasing in a plasma reactor Electricity 30 Active
US6660659B1 Plasma method and apparatus for processing a substrate Electricity 29 Expired
US8323754B2 Stabilization of high-k dielectric materials Electricity 19 Active
US7514373B2 Method and apparatus for plasma nitridation of gate dielectrics using amplitude modulated radio-frequency energy Electricity 12 Active
US7902018B2 Fluorine plasma treatment of high-k gate stack for defect passivation Electricity 8 Active
US8143147B1 Methods and systems for forming thin films Emerging Cross-Sectional Technologies 8 Active
US7727828B2 Method for fabricating a gate dielectric of a field effect transistor Electricity 7 Active
US11049694B2 Modular microwave source with embedded ground surface Electricity 6 Active
US9975758B2 Wafer processing equipment having exposable sensing layers Performing Operations; Transporting 6 Active
US7888217B2 Method for fabricating a gate dielectric of a field effect transistor Emerging Cross-Sectional Technologies 5 Active
US9725302B1 Wafer processing equipment having exposable sensing layers Performing Operations; Transporting 5 Active
US10607817B2 Thermal repeatability and in-situ showerhead temperature monitoring Electricity 4 Active
US7964418B2 Real time process monitoring and control for semiconductor junctions Emerging Cross-Sectional Technologies 4 Active
US10879042B2 Symmetric plasma source to generate pie shaped treatment Electricity 3 Active
US8110828B2 Real time process monitoring and control for semiconductor junctions Emerging Cross-Sectional Technologies 3 Active

Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.