Inventor · Dresden, DE

Ralf Illgen

24Patents
4h-index
14Co-inventors
52Inventor score

Filing activity: Nov 23, 2009 → May 3, 2017

Most-cited inventions

PatentTitleAreaCited byStatus
US9224840B2 Replacement gate FinFET structures with high mobility channel Electricity 27 Active
US8912606B2 Integrated circuits having protruding source and drain regions and methods for forming integrated circuits Electricity 14 Active
US9012277B2 In situ doping and diffusionless annealing of embedded stressor regions in PMOS and NMOS devices Electricity 6 Active
US8835936B2 Source and drain doping using doped raised source and drain regions Electricity 5 Active
US8536034B2 Methods of forming stressed silicon-carbon areas in an NMOS transistor Electricity 4 Active
US9449972B1 Ferroelectric FinFET Electricity 4 Active
US8835255B2 Method of forming a semiconductor structure including a vertical nanowire Electricity 4 Active
US9023713B2 Ultrathin body fully depleted silicon-on-insulator integrated circuits and methods for fabricating same Electricity 4 Active
US8466018B2 Methods of forming a PMOS device with in situ doped epitaxial source/drain regions Electricity 3 Active
US8580643B2 Threshold voltage adjustment in a Fin transistor by corner implantation Electricity 3 Active
US8143133B2 Technique for enhancing dopant profile and channel conductivity by millisecond anneal processes Electricity 3 Active
US9899417B2 Semiconductor structure including a first transistor and a second transistor Electricity 3 Active
US8338885B2 Technique for enhancing dopant profile and channel conductivity by millisecond anneal processes Electricity 3 Active
US10176859B2 Non-volatile transistor element including a buried ferroelectric material based storage mechanism Electricity 2 Active
US9583240B2 Temperature independent resistor Electricity 1 Active
US9269714B2 Device including a transistor having a stressed channel region and method for the formation thereof Electricity 1 Active
US10056376B2 Ferroelectric FinFET Electricity 1 Active
US8753969B2 Methods for fabricating MOS devices with stress memorization Electricity 1 Active
US8476131B2 Methods of forming a semiconductor device with recessed source/design regions, and a semiconductor device comprising same Electricity 0 Active
US8647951B2 Implantation of hydrogen to improve gate insulation layer-substrate interface Electricity 0 Active
US8941187B2 Strain engineering in three-dimensional transistors based on strained isolation material Electricity 0 Active
US9966466B2 Semiconductor-on-insulator wafer, semiconductor structure including a transistor, and methods for the formation and operation thereof Electricity 0 Active
US9685457B2 Method including a formation of a transistor and semiconductor structure including a first transistor and a second transistor Electricity 0 Active
US8916928B2 Threshold voltage adjustment in a fin transistor by corner implantation Electricity 0 Active

Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.