Inventor · Tokyo, JP

Satoshi Takechi

32Patents
12h-index
20Co-inventors
77Inventor score

Filing activity: Oct 12, 1989 → Oct 18, 2006

Most-cited inventions

PatentTitleAreaCited byStatus
US5968713A Chemically amplified resist compositions and process for the formation of resist patterns Physics 95 Expired
US6013416A Chemically amplified resist compositions and process for the formation of resist patterns Physics 93 Expired
US6329125A Chemically amplified resist compositions and process for the formation of resist patterns Physics 78 Expired
US6200725A Chemically amplified resist compositions and process for the formation of resist patterns Physics 54 Expired
US5879851A Method for forming resist patterns by using an ammonium or morpholine compound as a developer Physics 32 Expired
US5443690A Pattern formation material and pattern formation method Emerging Cross-Sectional Technologies 31 Expired
US6004720A Radiation sensitive material and method for forming pattern Emerging Cross-Sectional Technologies 28 Expired
US6207342A Chemically amplified resist material and process for the formation of resist patterns Emerging Cross-Sectional Technologies 23 Expired
US6344304B1 Radiation sensitive material and method for forming pattern Emerging Cross-Sectional Technologies 18 Expired
US5506088A Chemically amplified resist composition and process for forming resist pattern using same Emerging Cross-Sectional Technologies 17 Expired
US5153103A Resist composition and pattern formation process Emerging Cross-Sectional Technologies 14 Expired
US5019485A Process of using an electrically conductive layer-providing composition for formation of resist patterns Physics 13 Expired
US5326670A Process for forming resist pattern Emerging Cross-Sectional Technologies 12 Expired
US5856071A Resist material including si-containing resist having acid removable group combined with photo-acid generator Emerging Cross-Sectional Technologies 11 Expired
US5068169A Process for production of semiconductor device Emerging Cross-Sectional Technologies 9 Expired
US5066751A Resist material for energy beam lithography and method of using the same Physics 8 Expired
US5192643A Pattern-forming method and radiation resist for use when working this pattern-forming method Emerging Cross-Sectional Technologies 7 Expired
US5104479A Resist material for energy beam lithography and method of using the same Physics 7 Expired
US5403699A Process for formation of resist patterns Emerging Cross-Sectional Technologies 5 Expired
US7129017B2 Chemically amplified resist composition and method for forming patterned film using same Emerging Cross-Sectional Technologies 4 Expired
US6699645B2 Method for the formation of resist patterns Physics 4 Expired
US6120977A Photoresist with bleaching effect Emerging Cross-Sectional Technologies 3 Expired
US6887649B2 Multi-layered resist structure and manufacturing method of semiconductor device Emerging Cross-Sectional Technologies 3 Expired
US6790580B2 Resist material and method for forming a resist pattern with the resist material Emerging Cross-Sectional Technologies 3 Expired
US6248920A Preparation process for esters and resist materials Chemistry; Metallurgy 3 Expired

Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.