Inventor · Shanghai, CN

Zhaowei Jia

25Patents
2h-index
19Co-inventors
50Inventor score

Filing activity: Aug 20, 2008 → Mar 9, 2023

Most-cited inventions

PatentTitleAreaCited byStatus
US8598039B2 Barrier layer removal method and apparatus Electricity 7 Active
US11141762B2 System for cleaning semiconductor wafers Physics 2 Active
US9496172B2 Method for forming interconnection structures Electricity 2 Active
US9595457B2 Methods and apparatus for cleaning semiconductor wafers Electricity 1 Active
US9492852B2 Methods and apparatus for cleaning semiconductor wafers Electricity 1 Active
US11581205B2 Methods and system for cleaning semiconductor wafers Electricity 1 Active
US11257667B2 Methods and apparatus for cleaning semiconductor wafers Electricity 1 Active
US11037804B2 Methods and apparatus for cleaning substrates Emerging Cross-Sectional Technologies 1 Active
US10453743B2 Barrier layer removal method and semiconductor structure forming method Electricity 1 Active
US10910244B2 Methods and system for cleaning semiconductor wafers Electricity 1 Active
US10615073B2 Method for removing barrier layer for minimizing sidewall recess Electricity 0 Active
US11926920B2 Electroplating apparatus and electroplating method Electricity 0 Active
US11859303B2 Plating apparatus Chemistry; Metallurgy 0 Active
US9633833B2 Methods and apparatus for cleaning semiconductor wafers Electricity 0 Active
US11848217B2 Methods and apparatus for cleaning substrates Emerging Cross-Sectional Technologies 0 Active
US11008669B2 Apparatus for holding a substrate Electricity 0 Active
US11752529B2 Method for cleaning semiconductor wafers Physics 0 Active
US11967497B2 Methods and apparatus for cleaning semiconductor wafers Electricity 0 Active
US10217662B2 Method for processing interconnection structure for minimizing barrier sidewall recess Electricity 0 Active
US11103898B2 Methods and apparatus for cleaning substrates Performing Operations; Transporting 0 Active
US11633765B2 System for cleaning semiconductor wafers Physics 0 Active
US10020208B2 Methods and apparatus for cleaning semiconductor wafers Electricity 0 Active
US11469134B2 Plating chuck Electricity 0 Active
US11911808B2 System for cleaning semiconductor wafers Physics 0 Active
US11638937B2 Methods and apparatus for cleaning substrates Performing Operations; Transporting 0 Active

Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.