PSK INC.
29Patents
29Active
29Granted
53Portfolio score
Filing activity: Jun 5, 2009 → Feb 24, 2022 · 2 expiring within 5 years
Most-cited patents
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US8007218B2 | Unit and method for transferring substrates and apparatus and method for treating substrates with the unit | Emerging Cross-Sectional Technologies | 19 | Active |
| US9779918B2 | Substrate treating apparatus and method | Electricity | 10 | Active |
| US8574445B2 | Method for generating hollow cathode plasma and method for treating large area substrate using hollow cathode plasma | Electricity | 8 | Active |
| US9995402B2 | Two-way gate valve | Mechanical Engineering; Lighting; Heating | 3 | Active |
| US9514919B2 | Baffle and substrate treating apparatuses including the same | Electricity | 3 | Active |
| US9508541B2 | Apparatus and method for treating substrate | Electricity | 2 | Active |
| US10109459B1 | Substrate treating apparatus, substrate treating method, and plasma generating unit | Electricity | 1 | Active |
| US10395898B2 | Substrate treating apparatus, substrate treating method, and plasma generating unit | Electricity | 1 | Active |
| US11302558B2 | Substrate processing apparatus and substrate transfer method | Electricity | 1 | Active |
| US9214357B1 | Substrate treating apparatus and method | Electricity | 1 | Active |
| US10964565B2 | Substrate processing apparatus and method | Electricity | 1 | Active |
| US11776791B2 | Substrate processing apparatus and substrate processing method | Electricity | 0 | Active |
| US11854774B2 | Plasma detecting device | Electricity | 0 | Active |
| US9945570B2 | Unit and method for cooling, and apparatus and method for treating substrate | Electricity | 0 | Active |
| US12387911B2 | Support unit, apparatus for treating substrate, and method for treating substrate | Electricity | 0 | Active |
| US12417901B2 | Apparatus for treating substrate and method for aligning dielectric plate using the same | Electricity | 0 | Active |
| US9536708B2 | Plasma generating device, method of controlling the same, and substrate processing device including the plasma generating device | Electricity | 0 | Active |
| US10109466B2 | Support unit and apparatus for treating substrate | Electricity | 0 | Active |
| US11295933B2 | Substrate processing apparatus and substrate processing method | Electricity | 0 | Active |
| US12062525B2 | Support unit, and apparatus for treating substrate with the same | Electricity | 0 | Active |
| US12424417B2 | Substrate processing apparatus and substrate processing method | Electricity | 0 | Active |
| US11817291B2 | Faraday shield and apparatus for treating substrate | Electricity | 0 | Active |
| US11139152B2 | Substrate processing apparatus | Electricity | 0 | Active |
| US10309015B2 | Substrate treating apparatus and substrate treating method | Electricity | 0 | Active |
| US9390957B2 | Substrate transfer apparatus and method, and substrate processing apparatus | Electricity | 0 | Active |
Source: USPTO / EPO open patent data. Counts and citation impact are objective bibliographic measures.