Inventor · Suwon-si, KR

Hyo-San Lee

34Patents
6h-index
80Co-inventors
68Inventor score

Filing activity: Oct 29, 2004 → Apr 13, 2022

Most-cited inventions

PatentTitleAreaCited byStatus
US8344385B2 Vertical-type semiconductor device Electricity 40 Active
US7176041B2 PAA-based etchant, methods of using same, and resultant structures Electricity 21 Expired
US7709277B2 PAA-based etchant, methods of using same, and resultant structures Electricity 20 Active
US8766343B2 Integrated circuit capacitors having sidewall supports Electricity 10 Active
US8119476B2 Methods of forming integrated circuit capacitors having sidewall supports and capacitors formed thereby Electricity 9 Active
US8084367B2 Etching, cleaning and drying methods using supercritical fluid and chamber systems using these methods Emerging Cross-Sectional Technologies 7 Active
US8790470B2 Etching, cleaning and drying methods using supercritical fluid and chamber systems using these methods Emerging Cross-Sectional Technologies 6 Active
US8685272B2 Composition for etching silicon oxide layer, method for etching semiconductor device using the same, and composition for etching semiconductor device Electricity 4 Active
US8585917B2 Etching, cleaning and drying methods using supercritical fluid and chamber systems using these methods Emerging Cross-Sectional Technologies 4 Active
US10029332B2 Spot heater and device for cleaning wafer using the same Chemistry; Metallurgy 4 Active
US10083829B2 Apparatus for treating substrates using supercritical fluids, substrate treatment system including the same and method of treating substrates using the same Electricity 3 Active
US8557651B2 Method of manufacturing a semiconductor device using an etchant Electricity 2 Active
US10525566B2 Preparing conditioning disk for chemical mechanical polishing and chemical mechanical polishing method including the same Electricity 2 Active
US10576582B2 Spot heater and device for cleaning wafer using the same Chemistry; Metallurgy 2 Active
US7857939B2 Apparatus for treating wafers using supercritical fluid Emerging Cross-Sectional Technologies 2 Active
US8795541B2 Substrate processing method and substrate processing system for performing the same Electricity 2 Active
US8211804B2 Methods of forming a hole having a vertical profile and semiconductor devices having a vertical hole Electricity 2 Active
US10395951B2 Method of cleaning a substrate and apparatus for performing the same Electricity 1 Active
US8951383B2 Apparatus for treating wafers using supercritical fluid Emerging Cross-Sectional Technologies 1 Active
US8518772B2 Fabricating method of semiconductor device Electricity 1 Active
US10679843B2 Method of treating substrates using supercritical fluids Electricity 1 Active
US11142694B2 Etchant composition and method of fabricating semiconductor device Electricity 1 Active
US11149234B2 Cleaning composition, cleaning apparatus, and method of fabricating semiconductor device using the same Chemistry; Metallurgy 0 Active
US10668403B2 Source supplier for a supercritical fluid, substrate processing apparatus having the same Electricity 0 Active
US10795263B2 Compositions for removing photoresist Electricity 0 Active

Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.