Inventor · Matsumoto, JP

Tsunehiro Nakajima

23Patents
2h-index
24Co-inventors
53Inventor score

Filing activity: Jun 16, 2006 → Oct 30, 2020

Most-cited inventions

PatentTitleAreaCited byStatus
US9147599B2 Wafer support system and method for separating support substrate from solid-phase bonded wafer and method for manufacturing semiconductor device Electricity 4 Active
US9685333B2 Manufacturing method of silicon carbide semiconductor device Electricity 3 Active
US8324044B2 Method of producing a semiconductor device with an aluminum or aluminum alloy electrode Electricity 1 Active
US9564334B2 Method of manufacturing a semiconductor device Electricity 1 Active
US8604584B2 Semiconductor device and method of manufacturing semiconductor device Electricity 1 Active
US9972521B2 Method for manufacturing semiconductor device to facilitate peeling of a supporting substrate bonded to a semiconductor wafer Electricity 1 Active
US9922858B2 Semiconductor device manufacturing method Emerging Cross-Sectional Technologies 1 Active
US7897452B2 Method of producing a semiconductor device with an aluminum or aluminum alloy rear electrode Electricity 1 Active
US9741587B2 Semiconductor device and semiconductor device manufacturing method Electricity 1 Active
US9548205B2 Method of manufacturing a semiconductor device Electricity 1 Active
US8999768B2 Semiconductor device manufacturing method Electricity 1 Active
US10600921B2 Silicon carbide semiconductor device and method of manufacturing silicon carbide semiconductor device Electricity 1 Active
US8962405B2 Method of manufacturing semiconductor device by mounting and positioning a semiconductor die using detection marks Electricity 1 Active
US9070736B2 Semiconductor device Electricity 0 Active
US9905684B2 Semiconductor device having schottky junction between substrate and drain electrode Electricity 0 Active
US9892919B2 Semiconductor device manufacturing method Electricity 0 Active
US9972499B2 Method for forming metal-semiconductor alloy using hydrogen plasma Electricity 0 Active
US9728441B2 Method for manufacturing semiconductor device Electricity 0 Active
US11658231B2 Semiconductor device Electricity 0 Active
US10079155B2 Semiconductor device manufacturing method Electricity 0 Active
US9355858B2 Method of manufacturing semiconductor device Electricity 0 Active
US10374050B2 Silicon carbide semiconductor device and manufacturing method of silicon carbide semiconductor device Electricity 0 Active
US8722487B2 Semiconductor device with an electrode including an aluminum-silicon film Electricity 0 Active

Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.