Inventor · Camas, WA, US

Yoshi Ono

74Patents
20h-index
30Co-inventors
84Inventor score

Filing activity: Apr 30, 1998 → Oct 7, 2008

Most-cited inventions

PatentTitleAreaCited byStatus
US6420279B1 Methods of using atomic layer deposition to deposit a high dielectric constant material on a substrate Electricity 745 Expired
US6627503B2 Method of forming a multilayer dielectric stack Electricity 649 Expired
US6297539A Doped zirconia, or zirconia-like, dielectric film transistor structure and deposition method for same Electricity 604 Expired
US6930059B2 Method for depositing a nanolaminate film by atomic layer deposition Electricity 594 Expired
US7053009B2 Nanolaminate film atomic layer deposition method Electricity 551 Expired
US6875677B1 Method to control the interfacial layer for deposition of high dielectric constant films Electricity 534 Expired
US6407435B1 Multilayer dielectric stack and method Electricity 278 Expired
US6825106B1 Method of depositing a conductive niobium monoxide film for MOSFET gates Electricity 267 Expired
US6060755A Aluminum-doped zirconium dielectric film transistor structure and deposition method for same Electricity 159 Expired
US6207589A Method of forming a doped metal oxide dielectric film Electricity 100 Expired
US6200866A Use of silicon germanium and other alloys as the replacement gate for the fabrication of MOSFET Electricity 70 Expired
US6573134B2 Dual metal gate CMOS devices and method for making the same Electricity 62 Expired
US6686212B1 Method to deposit a stacked high-&kgr; gate dielectric for CMOS applications Electricity 57 Expired
US6348373B1 Method for improving electrical properties of high dielectric constant films Electricity 49 Expired
US6184110A Method of forming nitrogen implanted ultrathin gate oxide for dual gate CMOS devices Electricity 41 Expired
US7160819B2 Method to perform selective atomic layer deposition of zinc oxide Electricity 37 Expired
US6403453B1 Dose control technique for plasma doping in ultra-shallow junction formations Electricity 35 Expired
US7309621B2 Method to fabricate a nanowire CHEMFET sensor device using selective nanowire deposition Electricity 32 Expired
US7442415B2 Modulated temperature method of atomic layer deposition (ALD) of high dielectric constant films Electricity 27 Expired
US6861712B2 MOSFET threshold voltage tuning with metal gate stack control Electricity 20 Expired
US6468901B1 Nickel silicide including iridium for use in ultra-shallow junctions with high thermal stability and method of manufacturing the same Electricity 17 Expired
US6689646B1 Plasma method for fabricating oxide thin films Electricity 15 Expired
US6190925A Epitaxially grown lead germanate film and deposition method Emerging Cross-Sectional Technologies 15 Expired
US7208768B2 Electroluminescent device Emerging Cross-Sectional Technologies 14 Expired
US7029944B1 Methods of forming a microlens array over a substrate employing a CMP stop Electricity 14 Expired

Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.