Michael P. Belyansky
58Patents
10h-index
87Co-inventors
81Inventor score
Filing activity: Aug 23, 2001 → Nov 17, 2022
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US6977194B2 | Structure and method to improve channel mobility by gate electrode stress modification | Electricity | 180 | Expired |
| US7273638B2 | High density plasma oxidation | Electricity | 37 | Expired |
| US6562713B1 | Method of protecting semiconductor areas while exposing a gate | Electricity | 23 | Expired |
| US7585704B2 | Method of producing highly strained PECVD silicon nitride thin films at low temperature | Electricity | 22 | Expired |
| US6982196B2 | Oxidation method for altering a film structure and CMOS transistor structure formed therewith | Electricity | 19 | Expired |
| US6869860B2 | Filling high aspect ratio isolation structures with polysilazane based material | Electricity | 18 | Expired |
| US6890833B2 | Trench isolation employing a doped oxide trench fill | Electricity | 15 | Expired |
| US7691701B1 | Method of forming gate stack and structure thereof | Electricity | 13 | Active |
| US9929012B1 | Resist having tuned interface hardmask layer for EUV exposure | Electricity | 12 | Active |
| US7202516B2 | CMOS transistor structure including film having reduced stress by exposure to atomic oxygen | Electricity | 11 | Expired |
| US7271049B2 | Method of forming self-aligned low-k gate cap | Electricity | 9 | Active |
| US6642147B2 | Method of making thermally stable planarizing films | Electricity | 8 | Expired |
| US6914015B2 | HDP process for high aspect ratio gap filling | Electricity | 8 | Expired |
| US7659160B2 | Field effect transistors (FETS) with inverted source/drain metallic contacts, and method of fabrication same | Electricity | 7 | Active |
| US7230296B2 | Self-aligned low-k gate cap | Electricity | 6 | Expired |
| US10249730B1 | Controlling gate profile by inter-layer dielectric (ILD) nanolaminates | Electricity | 6 | Active |
| US7205206B2 | Method of fabricating mobility enhanced CMOS devices | Electricity | 5 | Expired |
| US9397002B1 | Self-aligned punchthrough stop doping in bulk finFET by reflowing doped oxide | Electricity | 5 | Active |
| US7648871B2 | Field effect transistors (FETS) with inverted source/drain metallic contacts, and method of fabricating same | Electricity | 5 | Active |
| US7342266B2 | Field effect transistors with dielectric source drain halo regions and reduced miller capacitance | Emerging Cross-Sectional Technologies | 4 | Expired |
| US7122849B2 | Stressed semiconductor device structures having granular semiconductor material | Electricity | 4 | Expired |
| US10388766B2 | Vertical transport FET (VFET) with dual top spacer | Electricity | 4 | Active |
| US10170582B1 | Uniform bottom spacer for vertical field effect transistor | Electricity | 3 | Active |
| US8557649B2 | Method for controlling structure height | Electricity | 3 | Active |
| US10741663B1 | Encapsulation layer for vertical transport field-effect transistor gate stack | Electricity | 3 | Active |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.