Inventor · Amuru, UG

Shoichi Yamauchi

35Patents
10h-index
35Co-inventors
75Inventor score

Filing activity: Apr 28, 1998 → Mar 24, 2020

Most-cited inventions

PatentTitleAreaCited byStatus
US6191007A Method for manufacturing a semiconductor substrate Electricity 510 Expired
US6534380B1 Semiconductor substrate and method of manufacturing the same Emerging Cross-Sectional Technologies 233 Expired
US6251754A Semiconductor substrate manufacturing method Electricity 186 Expired
US6495294B1 Method for manufacturing semiconductor substrate having an epitaxial film in the trench Electricity 46 Expired
US6495883B2 Trench gate type semiconductor device and method of manufacturing Electricity 38 Expired
US7170119B2 Vertical type semiconductor device Electricity 31 Expired
US6836001B2 Semiconductor device having epitaxially-filled trench and method for manufacturing semiconductor device having epitaxially-filled trench Electricity 20 Expired
US6406982B2 Method of improving epitaxially-filled trench by smoothing trench prior to filling Electricity 15 Expired
US7811907B2 Method for manufacturing semiconductor device and epitaxial growth equipment Electricity 14 Active
US7642178B2 Semiconductor device, method for manufacturing the same and method for evaluating the same Electricity 10 Active
US7601603B2 Method for manufacturing semiconductor device Electricity 9 Expired
US7417284B2 Semiconductor device and method of manufacturing the same Electricity 7 Expired
US7342265B2 Vertical-type semiconductor device having repetitive-pattern layer Electricity 7 Expired
US7037789B2 Stabilization of dopant concentration in semiconductor device having epitaxially-filled trench Electricity 6 Expired
US7553731B2 Method of manufacturing semiconductor device Electricity 4 Active
USRE44236E1 Method for manufacturing semiconductor device General 4 Active
US7465990B2 Semiconductor device having super junction structure Electricity 4 Expired
US7633123B2 Semiconductor device having super junction structure Electricity 3 Active
US7364980B2 Manufacturing method of semiconductor substrate Electricity 2 Active
US6642577B2 Semiconductor device including power MOSFET and peripheral device and method for manufacturing the same Electricity 2 Expired
US10550040B2 Red zirconia sintered body and method for manufacturing the same Chemistry; Metallurgy 2 Active
US7063751B2 Semiconductor substrate formed by epitaxially filling a trench in a semiconductor substrate with a semiconductor material after smoothing the surface and rounding the corners Electricity 2 Expired
US7026248B2 Method for manufacturing semiconductor device with semiconductor region inserted into trench Electricity 1 Expired
US7517771B2 Method for manufacturing semiconductor device having trench Electricity 1 Active
US9919971B2 Zirconia sintered body and use thereof Chemistry; Metallurgy 1 Active

Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.