Inventor · Kokubunji, JP

Tokuo Kure

61Patents
24h-index
124Co-inventors
91Inventor score

Filing activity: May 21, 1982 → Oct 18, 2013

Most-cited inventions

PatentTitleAreaCited byStatus
US4985114A Dry etching by alternately etching and depositing Emerging Cross-Sectional Technologies 545 Expired
US5177576A Dynamic random access memory having trench capacitors and vertical transistors Electricity 118 Expired
US5412210A Scanning electron microscope and method for production of semiconductor device by using the same Electricity 88 Expired
US5196910A Semiconductor memory device with recessed array region Electricity 79 Expired
US5188976A Manufacturing method of non-volatile semiconductor memory device Electricity 78 Expired
US4970564A Semiconductor memory device having stacked capacitor cells Electricity 76 Expired
US5481109A Surface analysis method and apparatus for carrying out the same Electricity 72 Expired
US4882289A Method of making a semiconductor memory device with recessed array region Emerging Cross-Sectional Technologies 70 Expired
US5140389A Semiconductor memory device having stacked capacitor cells Electricity 56 Expired
US5091761A Semiconductor device having an arrangement of IGFETs and capacitors stacked thereover Electricity 56 Expired
US4529476A Gas for selectively etching silicon nitride and process for selectively etching silicon nitride with the gas Electricity 52 Expired
US5594245A Scanning electron microscope and method for dimension measuring by using the same Electricity 47 Expired
US4937641A Semiconductor memory and method of producing the same Electricity 46 Expired
US5053849A Transistor with overlapping gate/drain and two-layered gate structures Electricity 43 Expired
US4751557A Dram with FET stacked over capacitor Electricity 42 Expired
US5296729A Semiconductor memory device having static random access memory Emerging Cross-Sectional Technologies 39 Expired
US5658811A Method of manufacturing a semiconductor device Electricity 38 Expired
US4635090A Tapered groove IC isolation Emerging Cross-Sectional Technologies 37 Expired
US5352324A Etching method and etching apparatus therefor Electricity 37 Expired
US6114695A Scanning electron microscope and method for dimension measuring by using the same Electricity 35 Expired
US5877498A Method and apparatus for X-ray analyses Electricity 32 Expired
US5357464A Semiconductor memory having writing and reading transistors, method of fabrication thereof, and method of use thereof Electricity 30 Expired
US4396460A Method of forming groove isolation in a semiconductor device Electricity 25 Expired
US5866904A Scanning electron microscope and method for dimension measuring by using the same Electricity 24 Expired
US5969357A Scanning electron microscope and method for dimension measuring by using the same Electricity 23 Expired

Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.