Inventor · Saitama, JP

Toru Kaga

42Patents
19h-index
83Co-inventors
84Inventor score

Filing activity: Jul 19, 1984 → Apr 15, 2008

Most-cited inventions

PatentTitleAreaCited byStatus
US5106775A Process for manufacturing vertical dynamic random access memories Electricity 405 Expired
US5177576A Dynamic random access memory having trench capacitors and vertical transistors Electricity 118 Expired
US5466621A Method of manufacturing a semiconductor device having silicon islands Emerging Cross-Sectional Technologies 101 Expired
US5196910A Semiconductor memory device with recessed array region Electricity 79 Expired
US5346834A Method for manufacturing a semiconductor device and a semiconductor memory device Emerging Cross-Sectional Technologies 79 Expired
US4882289A Method of making a semiconductor memory device with recessed array region Emerging Cross-Sectional Technologies 70 Expired
US5115289A Semiconductor device and semiconductor memory device Electricity 56 Expired
US5140389A Semiconductor memory device having stacked capacitor cells Electricity 56 Expired
US5194749A Semiconductor integrated circuit device Emerging Cross-Sectional Technologies 51 Expired
US4918502A Semiconductor memory having trench capacitor formed with sheath electrode Electricity 45 Expired
US5483083A Semiconductor integrated circuit device Emerging Cross-Sectional Technologies 42 Expired
US4633438A Stacked semiconductor memory Electricity 40 Expired
US4656607A Electrically erasable programmable RAM Physics 39 Expired
US4873560A Dynamic random access memory having buried word lines Emerging Cross-Sectional Technologies 37 Expired
US5202275A Semiconductor integrated circuit device, process for fabricating the same, and apparatus for fabricating the same Emerging Cross-Sectional Technologies 27 Expired
US4668970A Semiconductor device Electricity 25 Expired
US4967247A Vertical dynamic random access memory Electricity 24 Expired
US5349218A Semiconductor integrated circuit device including memory cells having a structure effective in suppression of leak current Electricity 22 Expired
US5331191A Semiconductor integrated circuit device, process for fabricating the same, and apparatus for fabricating the same Emerging Cross-Sectional Technologies 22 Expired
US5200635A Semiconductor device having a low-resistivity planar wiring structure Electricity 18 Expired
US7385197B2 Electron beam apparatus and a device manufacturing method using the same apparatus Electricity 17 Active
US5012310A Semiconductor memory having stacked capacitor Electricity 16 Expired
US5780882A Semiconductor integrated circuit device, process for fabricating the same, and apparatus for fabricating the same Emerging Cross-Sectional Technologies 14 Expired
USRE38296E1 Semiconductor memory device with recessed array region General 12 Expired
US5739589A Semiconductor integrated circuit device process for fabricating the same and apparatus for fabricating the same Emerging Cross-Sectional Technologies 11 Expired

Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.