Inventor · Santa Clara, CA, US

Tuan Pham

101Patents
17h-index
112Co-inventors
89Inventor score

Filing activity: Dec 17, 1997 → May 26, 2022

Most-cited inventions

PatentTitleAreaCited byStatus
US9659956B1 Three-dimensional memory device containing source select gate electrodes with enhanced electrical isolation Electricity 74 Active
US5998301A Method and system for providing tapered shallow trench isolation structure profile Electricity 48 Expired
US6261904A Dual bit isolation scheme for flash devices Electricity 39 Expired
US9917093B2 Inter-plane offset in backside contact via structures for a three-dimensional memory device Electricity 32 Active
US10014316B2 Three-dimensional memory device with leakage reducing support pillar structures and method of making thereof Electricity 30 Active
US6867097B1 Method of making a memory cell with polished insulator layer Electricity 29 Expired
US7795080B2 Methods of forming integrated circuit devices using composite spacer structures Physics 28 Active
US8546239B2 Methods of fabricating non-volatile memory with air gaps Electricity 25 Active
US6934772B2 Lowering display power consumption by dithering brightness Physics 24 Expired
US10103161B2 Offset backside contact via structures for a three-dimensional memory device Electricity 23 Active
US9842851B2 Three-dimensional memory devices having a shaped epitaxial channel portion Electricity 22 Active
US8603890B2 Air gap isolation in non-volatile memory Electricity 21 Active
US10283566B2 Three-dimensional memory device with through-stack contact via structures and method of making thereof Electricity 20 Active
US8969206B1 Triple patterning NAND flash memory with stepped mandrel Electricity 20 Active
US9768270B2 Method of selectively depositing floating gate material in a memory device Electricity 19 Active
US7723186B2 Method of forming memory with floating gates including self-aligned metal nanodots using a coupling layer Emerging Cross-Sectional Technologies 18 Active
US8492224B2 Metal control gate structures and air gap isolation in non-volatile memory Electricity 18 Active
US5966618A Method of forming dual field isolation structures Electricity 17 Expired
US7541240B2 Integration process flow for flash devices with low gap fill aspect ratio Electricity 15 Expired
US7183153B2 Method of manufacturing self aligned non-volatile memory cells Electricity 14 Expired
US7582529B2 Methods of fabricating non-volatile memory with integrated peripheral circuitry and pre-isolation memory cell formation Electricity 14 Active
US7362615B2 Methods for active boosting to minimize capacitive coupling effect between adjacent gates of flash memory devices Electricity 14 Expired
US7504686B2 Self-aligned non-volatile memory cell Electricity 14 Active
US6465303B1 Method of manufacturing spacer etch mask for silicon-oxide-nitride-oxide-silicon (SONOS) type nonvolatile memory Electricity 13 Expired
US7482223B2 Multi-thickness dielectric for semiconductor memory Electricity 13 Expired

Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.