Inventor · San Diego, CA, US

Xiuyu Cai

175Patents
18h-index
95Co-inventors
85Inventor score

Filing activity: Jan 16, 2012 → Sep 11, 2023

Most-cited inventions

PatentTitleAreaCited byStatus
US8524592B1 Methods of forming semiconductor devices with self-aligned contacts and low-k spacers and the resulting devices Electricity 44 Active
US8703557B1 Methods of removing dummy fin structures when forming finFET devices Electricity 42 Active
US9502518B2 Multi-channel gate-all-around FET Electricity 40 Active
US9455331B1 Method and structure of forming controllable unmerged epitaxial material Electricity 34 Active
US8541274B1 Methods of forming 3-D semiconductor devices with a nanowire gate structure wherein the nanowire gate structure is formed after source/drain formation Electricity 32 Active
US9190260B1 Topological method to build self-aligned MTJ without a mask Electricity 31 Active
US9190486B2 Integrated circuits and methods for fabricating integrated circuits with reduced parasitic capacitance Electricity 29 Active
US9202920B1 Methods for forming vertical and sharp junctions in finFET structures Electricity 25 Active
US8921191B2 Integrated circuits including FINFET devices with lower contact resistance and reduced parasitic capacitance and methods for fabricating the same Electricity 25 Active
US9391200B2 FinFETs having strained channels, and methods of fabricating finFETs having strained channels Electricity 24 Active
US9748352B2 Multi-channel gate-all-around FET Electricity 24 Active
US9147748B1 Methods of forming replacement spacer structures on semiconductor devices Electricity 24 Active
US8835262B2 Methods of forming bulk FinFET devices by performing a recessing process on liner materials to define different fin heights and FinFET devices with such recessed liner materials Electricity 21 Active
US8753970B2 Methods of forming semiconductor devices with self-aligned contacts and the resulting devices Electricity 21 Active
US9070742B2 FinFet integrated circuits with uniform fin height and methods for fabricating the same Electricity 20 Active
US8841711B1 Methods of increasing space for contact elements by using a sacrificial liner and the resulting device Electricity 20 Active
US8551843B1 Methods of forming CMOS semiconductor devices Electricity 20 Active
US9082852B1 LDMOS FinFET device using a long channel region and method of manufacture Electricity 19 Active
US9064890B1 Methods of forming isolation material on FinFET semiconductor devices and the resulting devices Electricity 16 Active
US9153498B2 Methods of forming semiconductor device with self-aligned contact elements and the resulting devices Electricity 15 Active
US8815742B2 Methods of forming bulk FinFET semiconductor devices by performing a liner recessing process to define fin heights and FinFET devices with such a recessed liner Electricity 15 Active
US8580634B1 Methods of forming 3-D semiconductor devices with a nanowire gate structure wherein the nanowire gate structure is formed prior to source/drain formation Electricity 14 Active
US9281382B2 Method for making semiconductor device with isolation pillars between adjacent semiconductor fins Electricity 14 Active
US9337050B1 Methods of forming fins for finFET semiconductor devices and the selective removal of such fins Electricity 13 Active
US8941156B2 Self-aligned dielectric isolation for FinFET devices Electricity 13 Active

Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.