Inventor · Newark, DE, US

Zhendong Liu

40Patents
8h-index
50Co-inventors
78Inventor score

Filing activity: Jan 23, 2003 → Sep 25, 2024

Most-cited inventions

PatentTitleAreaCited byStatus
US7018560B2 Composition for polishing semiconductor layers Electricity 29 Expired
US8558299B2 Semiconductor device with gate electrode stack including low resistivity tungsten and method of forming Electricity 22 Active
US9583349B2 Lowering tungsten resistivity by replacing titanium nitride with titanium silicon nitride Electricity 16 Active
US8895450B2 Low resistivity tungsten PVD with enhanced ionization and RF power coupling Electricity 15 Active
US8071479B2 Chemical mechanical polishing composition and methods relating thereto Electricity 13 Active
US8025813B2 Chemical mechanical polishing composition and methods relating thereto Electricity 11 Active
US8119529B2 Method for chemical mechanical polishing a substrate Chemistry; Metallurgy 9 Active
US6971945B2 Multi-step polishing solution for chemical mechanical planarization Electricity 9 Expired
US7884032B2 Thin film deposition Electricity 7 Active
US7300480B2 High-rate barrier polishing composition Electricity 6 Expired
US8129280B2 Substrate device having a tuned work function and methods of forming thereof Electricity 6 Active
US7253111B2 Barrier polishing solution Electricity 5 Expired
US8460519B2 Protective offset sputtering Electricity 5 Active
US7775397B2 Automatic valve assembly for a water cooler reservoir Performing Operations; Transporting 5 Active
US7427362B2 Corrosion-resistant barrier polishing solution Electricity 5 Expired
US8431490B2 Method of chemical mechanical polishing a substrate with polishing composition adapted to enhance silicon oxide removal Chemistry; Metallurgy 4 Active
US7300603B2 Chemical mechanical planarization compositions for reducing erosion in semiconductor wafers Chemistry; Metallurgy 4 Expired
US7842192B2 Multi-component barrier polishing solution Chemistry; Metallurgy 4 Active
US7051902B2 Automatic valve assembly for a water cooler reservoir Performing Operations; Transporting 4 Expired
US8492277B2 Method of polishing a substrate comprising polysilicon and at least one of silicon oxide and silicon nitride Chemistry; Metallurgy 4 Active
USD1037599S1 Kayak roller with suction cup General 2 Active
US7300602B2 Selective barrier metal polishing solution Electricity 2 Expired
US8232208B2 Stabilized chemical mechanical polishing composition and method of polishing a substrate Chemistry; Metallurgy 2 Active
US9873535B2 Molybdate-free sterilizing and pasteurizing solutions Performing Operations; Transporting 1 Active
US9834840B2 Process kit shield for improved particle reduction Electricity 1 Active

Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.