Sadayuki Okudaira
33Patents
19h-index
48Co-inventors
81Inventor score
Filing activity: Apr 15, 1977 → Mar 8, 2002
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US4579623A | Method and apparatus for surface treatment by plasma | Electricity | 595 | Expired |
| US4985114A | Dry etching by alternately etching and depositing | Emerging Cross-Sectional Technologies | 545 | Expired |
| US4857137A | Process for surface treatment | Electricity | 497 | Expired |
| US4992136A | Dry etching method | Electricity | 233 | Expired |
| US4481229A | Method for growing silicon-including film by employing plasma deposition | Chemistry; Metallurgy | 129 | Expired |
| US4563240A | Method and apparatus for plasma process | Electricity | 99 | Expired |
| US4599135A | Thin film deposition | Chemistry; Metallurgy | 62 | Expired |
| US5354416A | Dry etching method | Electricity | 56 | Expired |
| US4609426A | Method and apparatus for monitoring etching | Physics | 47 | Expired |
| US4462863A | Microwave plasma etching | Electricity | 45 | Expired |
| US4330384A | Process for plasma etching | Electricity | 38 | Expired |
| US4433228A | Microwave plasma source | Electricity | 33 | Expired |
| US4559100A | Microwave plasma etching apparatus | Electricity | 32 | Expired |
| US4943344A | Etching method | Electricity | 31 | Expired |
| US4986877A | Method of dry etching | Electricity | 30 | Expired |
| US4298419A | Dry etching apparatus | Chemistry; Metallurgy | 30 | Expired |
| US4705595A | Method for microwave plasma processing | Electricity | 27 | Expired |
| US4101411A | Plasma etching apparatus | Electricity | 26 | Expired |
| US5147500A | Dry etching method | Electricity | 24 | Expired |
| US4624214A | Dry-processing apparatus | Electricity | 19 | Expired |
| US4430138A | Microwave plasma etching apparatus having fan-shaped discharge | Electricity | 17 | Expired |
| US5580420A | Plasma generating method and apparatus and plasma processing method and apparatus | Electricity | 17 | Expired |
| US4844767A | Method of and apparatus for etching | Electricity | 16 | Expired |
| US5874013A | Semiconductor integrated circuit arrangement fabrication method | Electricity | 13 | Expired |
| US5643473A | Dry etching method | Electricity | 12 | Expired |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.