Inventor · Austin, TX, US

Steven Scheer

25Patents
7h-index
21Co-inventors
65Inventor score

Filing activity: Jun 30, 2004 → Jul 9, 2018

Most-cited inventions

PatentTitleAreaCited byStatus
US7673278B2 Enhanced process yield using a hot-spot library Electricity 22 Active
US7829269B1 Dual tone development with plural photo-acid generators in lithographic applications Physics 19 Active
US8097402B2 Using electric-field directed post-exposure bake for double-patterning (D-P) Electricity 19 Active
US8288174B1 Electrostatic post exposure bake apparatus and method Electricity 12 Active
US8129080B2 Variable resist protecting groups Physics 10 Active
US10020195B2 Chemical amplification methods and techniques for developable bottom anti-reflective coatings and dyed implant resists Electricity 7 Active
US7588879B2 Graded spin-on organic antireflective coating for photolithography Emerging Cross-Sectional Technologies 7 Active
US8795952B2 Line pattern collapse mitigation through gap-fill material application Physics 6 Active
US7483804B2 Method of real time dynamic CD control Physics 5 Active
US8197996B2 Dual tone development processes Physics 5 Active
US7816069B2 Graded spin-on organic antireflective coating for photolithography Emerging Cross-Sectional Technologies 4 Active
US8283111B2 Method for creating gray-scale features for dual tone development processes Physics 3 Active
US9454081B2 Line pattern collapse mitigation through gap-fill material application Physics 3 Active
US9085045B2 Method and system for controlling a spike anneal process Electricity 3 Active
US8449293B2 Substrate treatment to reduce pattern roughness Physics 2 Active
US8574810B2 Dual tone development with a photo-activated acid enhancement component in lithographic applications Physics 2 Active
US8257911B2 Method of process optimization for dual tone development Physics 1 Active
US7267863B2 Film stack having under layer for preventing pinhole defects Emerging Cross-Sectional Technologies 1 Expired
US7473461B2 Film stack having under layer for preventing pinhole defects Emerging Cross-Sectional Technologies 0 Active
US9383138B2 Methods and heat treatment apparatus for uniformly heating a substrate during a bake process Mechanical Engineering; Lighting; Heating 0 Active
US7541065B2 Method of forming film stack having under layer for preventing pinhole defects Emerging Cross-Sectional Technologies 0 Active
US7632631B2 Method of preventing pinhole defects through co-polymerization Emerging Cross-Sectional Technologies 0 Active
US8568964B2 Flood exposure process for dual tone development in lithographic applications Physics 0 Active
US12165870B2 Chemical amplification methods and techniques for developable bottom anti-reflective coatings and dyed implant resists Electricity 0 Active
US7132316B2 After deposition method of thinning film to reduce pinhole defects Electricity 0 Expired

Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.