Patent assignee · KR · COMPANY

SK ENPULSE CO., LTD.

24Patents
24Active
24Granted
63Portfolio score

Filing activity: Jan 18, 2018 → Apr 26, 2024

Most-cited patents

PatentTitleAreaCited byStatus
US11642752B2 Porous polyurethane polishing pad and process for preparing the same Chemistry; Metallurgy 1 Active
US12076832B2 Polishing pad with improved crosslinking density and process for preparing the same Electricity 0 Active
US12042900B2 Polishing system, polishing pad and method of manufacturing semiconductor device Performing Operations; Transporting 0 Active
US12162114B2 Polishing pad, manufacturing method thereof and preparing method of semiconductor device using the same Chemistry; Metallurgy 0 Active
US12136539B1 Semiconductor device fabrication apparatus Electricity 0 Active
US11724391B2 Method and apparatus for determining status of a robot Electricity 0 Active
US12362232B2 Polishing pad and method for preparing semiconductor device using the same Electricity 0 Active
US12276905B2 Blank mask and photomask using the same Physics 0 Active
US12258460B2 Polishing pad and method of fabricating semiconductor device using the same Chemistry; Metallurgy 0 Active
US11772236B2 Porous polishing pad and process for producing the same all fees Electricity 0 Active
US11766759B2 Porous polyurethane polishing pad and process for producing the same Electricity 0 Active
US11724356B2 Porous polyurethane polishing pad and preparation method thereof Chemistry; Metallurgy 0 Active
US11964360B2 Polishing pad comprising window similar in hardness to polishing layer Electricity 0 Active
US11759909B2 Polishing pad, preparation method thereof and method for preparing semiconductor device using same Electricity 0 Active
US12138736B2 Polishing pad sheet, polishing pad, and method for manufacturing semiconductor device Chemistry; Metallurgy 0 Active
US11931856B2 Polishing pad, process for preparing the same, and process for preparing a semiconductor device using the same Electricity 0 Active
US11780057B2 Polishing pad and method for producing same Electricity 0 Active
US12110421B2 Composition for semiconductor processing and method of fabricating semiconductor device using the same Electricity 0 Active
US12138738B2 Polishing pad, preparation method thereof and method for preparing semiconductor device using same Electricity 0 Active
US11951591B2 Polishing pad, method for producing the same and method of fabricating semiconductor device using the same Performing Operations; Transporting 0 Active
US12246408B2 Polishing pad and method of fabricating semiconductor device using the same Electricity 0 Active
US12122013B2 Composition for polishing pad and polishing pad Chemistry; Metallurgy 0 Active
US12027395B2 Method and apparatus for measuring displacement of an end effector Electricity 0 Active
US12116503B2 Polishing composition for semiconductor process and method for manufacturing semiconductor device by using the same Electricity 0 Active

Source: USPTO / EPO open patent data. Counts and citation impact are objective bibliographic measures.