Satoshi Shimamoto
49Patents
6h-index
52Co-inventors
72Inventor score
Filing activity: Mar 9, 1993 → Jan 13, 2020
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US9929005B1 | Method of manufacturing semiconductor device | Electricity | 326 | Active |
| US9472391B2 | Semiconductor device manufacturing method | Electricity | 11 | Active |
| US6635937B2 | Semiconductor integrated circuit device | Electricity | 7 | Expired |
| US5500170A | Heating and extruding method and device for bulk preform | Performing Operations; Transporting | 7 | Expired |
| US9054046B2 | Method of manufacturing semiconductor device and method of processing substrate | Electricity | 7 | Active |
| US5981301A | Regeneration method and apparatus of wafer and substrate | Emerging Cross-Sectional Technologies | 6 | Expired |
| US9613798B2 | Method of manufacturing semiconductor device, substrate processing apparatus, and recording medium | Chemistry; Metallurgy | 6 | Active |
| US9349586B2 | Method of manufacturing semiconductor device, substrate processing apparatus, substrate processing system and non-transitory computer-readable recording medium | Electricity | 5 | Active |
| US8987146B2 | Method of manufacturing semiconductor device, method of processing substrate, substrate processing apparatus and non-transitory computer-readable recording medium | Electricity | 5 | Active |
| US8785333B2 | Method of manufacturing semiconductor device, substrate processing apparatus, and recording medium | Electricity | 5 | Active |
| US9793107B2 | Method of manufacturing semiconductor device, substrate processing apparatus, and recording medium | Electricity | 4 | Active |
| US9218959B2 | Method of manufacturing semiconductor device, method of processing substrate, substrate processing apparatus and non-transitory computer-readable recording medium | Electricity | 3 | Active |
| US9698007B2 | Method of manufacturing semiconductor device, substrate processing apparatus, and recording medium | Electricity | 3 | Active |
| US9732426B2 | Method of manufacturing semiconductor device, substrate processing apparatus, and recording medium | Electricity | 2 | Active |
| US9773661B2 | Method of manufacturing semiconductor device, substrate processing apparatus, and recording medium | Electricity | 2 | Active |
| US9890458B2 | Method of manufacturing semiconductor device, substrate processing apparatus, and recording medium | Electricity | 2 | Active |
| US6762444B2 | Semiconductor integrated circuit device and a method of manufacturing the same | Electricity | 2 | Expired |
| US5458838A | Heating and extruding method for bulk preform | Performing Operations; Transporting | 2 | Expired |
| US7022563B2 | Semiconductor integrated circuit device and a method of manufacturing the same | Electricity | 2 | Expired |
| US9460911B2 | Method of manufacturing semiconductor device and substrate processing method | Electricity | 2 | Active |
| US9478413B2 | Method of manufacturing semiconductor device, substrate processing method, substrate processing apparatus, and recording medium | Electricity | 2 | Active |
| US10490400B2 | Method of manufacturing semiconductor device, substrate processing apparatus, and recording medium | Electricity | 2 | Active |
| US10720325B2 | Method of manufacturing semiconductor device, substrate processing apparatus and non-transitory computer-readable recording medium | Electricity | 2 | Active |
| US9978587B2 | Method of manufacturing semiconductor device including forming a film containing a first element, a second element and carbon, substrate processing apparatus, and recording medium | Electricity | 1 | Active |
| US9524867B2 | Method of manufacturing semiconductor device, substrate processing apparatus, and recording medium | Electricity | 1 | Active |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.