Inventor · Yokohama, JP

Shigehiko Saida

25Patents
11h-index
22Co-inventors
75Inventor score

Filing activity: Mar 13, 1996 → Apr 27, 2015

Most-cited inventions

PatentTitleAreaCited byStatus
US6333547A Semiconductor device and method of manufacturing the same Electricity 68 Expired
US6903422B2 Semiconductor integrated circuits, fabrication method for the same and semiconductor integrated circuit systems Electricity 35 Expired
US6284583A Semiconductor device and method of manufacturing the same Electricity 34 Expired
US5869858A Semiconductor device for reducing variations in characteristics of the device Electricity 30 Expired
US7372113B2 Semiconductor device and method of manufacturing the same Electricity 29 Expired
US5866930A Semiconductor device and method of manufacturing the same Electricity 27 Expired
US6326658A Semiconductor device including an interface layer containing chlorine Electricity 26 Expired
US5949102A Semiconductor device having a gate electrode with only two crystal grains Electricity 25 Expired
US6774462B2 Semiconductor device comprising dual silicon nitride layers with varying nitrogen ratio Electricity 19 Expired
US6790723B2 Semiconductor device and method of manufacturing the same Electricity 11 Expired
US6146938A Method of fabricating semiconductor device Electricity 11 Expired
US7081386B2 Semiconductor device and method of manufactuing the same Electricity 8 Expired
US6713359B1 Semiconductor device and method of manufacturing the same including raised source/drain comprising SiGe or SiC Electricity 6 Expired
US6794713B2 Semiconductor device and method of manufacturing the same including a dual layer raised source and drain Electricity 6 Expired
US7060555B2 Semiconductor device and method of manufacturing the same Electricity 4 Expired
US7098115B2 Semiconductor device and method of manufacturing the same Electricity 4 Expired
US6772045B2 System for determining dry cleaning timing, method for determining dry cleaning timing, dry cleaning method, and method for manufacturing semiconductor device Emerging Cross-Sectional Technologies 3 Expired
US7148158B2 Semiconductor device and method for manufacturing the same Electricity 2 Expired
US7129132B2 Semiconductor device and method of manufacturing the same Electricity 2 Expired
US6538271B2 Semiconductor device and method of manufacturing the same Electricity 1 Expired
USRE46122E1 Semiconductor device and method of manufacturing the same General 0 Active
US7541233B2 Semiconductor device and method of manufacturing the same Electricity 0 Active
US6841850B2 Semiconductor device having silicon nitride film and silicon oxide film, and method of fabricating the same Electricity 0 Expired
US6992020B2 Method of fabricating semiconductor device Electricity 0 Expired
US7612401B2 Non-volatile memory cell Electricity 0 Active

Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.