Inventor · Guilderland, NY, US

Heng Wu

168Patents
11h-index
66Co-inventors
75Inventor score

Filing activity: Jan 12, 2017 → Dec 27, 2023

Most-cited inventions

PatentTitleAreaCited byStatus
US10229985B1 Vertical field-effect transistor with uniform bottom spacer Electricity 267 Active
US10566246B1 Shared contact trench comprising dual silicide layers and dual epitaxial layers for source/drain layers of NFET and PFET devices Electricity 29 Active
US10056289B1 Fabrication of vertical transport fin field effect transistors with a self-aligned separator and an isolation region with an air gap Electricity 25 Active
US10243061B1 Nanosheet transistor Electricity 21 Active
US10236364B1 Tunnel transistor Electricity 15 Active
US10084094B1 Wrapped source/drain contacts with enhanced area Electricity 14 Active
US10522649B2 Inverse T-shaped contact structures having air gap spacers Electricity 13 Active
US10797163B1 Leakage control for gate-all-around field-effect transistor devices Electricity 12 Active
US10134859B1 Transistor with asymmetric spacers Electricity 12 Active
US10388569B1 Formation of stacked nanosheet semiconductor devices Electricity 12 Active
US10020381B1 Embedded bottom metal contact formed by a self-aligned contact process for vertical transistors Electricity 11 Active
US10985064B2 Buried power and ground in stacked vertical transport field effect transistors Electricity 9 Active
US11177258B2 Stacked nanosheet CFET with gate all around structure Electricity 8 Active
US10249755B1 Transistor with asymmetric source/drain overlap Electricity 6 Active
US10727315B2 Nanosheet transistor Electricity 6 Active
US9947767B1 Self-limited inner spacer formation for gate-all-around field effect transistors Electricity 5 Active
US11049953B2 Nanosheet transistor Electricity 5 Active
US10910470B1 Nanosheet transistors with inner airgaps Electricity 4 Active
US11362193B2 Inverse T-shaped contact structures having air gap spacers Electricity 4 Active
US10332983B1 Vertical field-effect transistors including uniform gate lengths Electricity 4 Active
US10332999B1 Method and structure of forming fin field-effect transistor without strain relaxation Electricity 4 Active
US11011617B2 Formation of a partial air-gap spacer Electricity 3 Active
US10374089B2 Tensile strain in NFET channel Electricity 3 Active
US10170590B2 Vertical field effect transistors with uniform threshold voltage Electricity 3 Active
US11251362B2 Stacked spin-orbit-torque magnetoresistive random-access memory Electricity 3 Active

Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.